[1] Bhushan B, Jung Y C, Nosonovsky M. Lotus effect: surfaces with roughness-induced superhydrophobicity, self-cleaning, and low adhesion[M]. Bhushan B. Springer handbook of nanotechnology. Springer handbooks, 1437-1524(2010).

[2] Gao X F, Yan X, Yao X et al. The dry-style antifogging properties of mosquito compound eyes and artificial analogues prepared by soft lithography[J]. Advanced Materials, 19, 2213-2217(2007).

[3] Luo Y H, Liu Y F, Zhang D Y et al. Influence of morphology for drag reduction effect of sharkskin surface[J]. Journal of Mechanics in Medicine and Biology, 14, 1450029(2014).

[4] Luo Y H, Yuan L, Li J H et al. Boundary layer drag reduction research hypotheses derived from bio-inspired surface and recent advanced applications[J]. Micron, 79, 59-73(2015).

[5] Liu K S, Du J X, Wu J T et al. Superhydrophobic gecko feet with high adhesive forces towards water and their bio-inspired materials[J]. Nanoscale, 4, 768-772(2012).

[6] Tang Q T, Yao H Y, Xu B B et al. Integrated effect of hierarchical structure combining isotropic worm-like pit with anisotropic inverted nanopyramid for quasi-omnidirectional c-Si solar cell[J]. Materials Science in Semiconductor Processing, 121, 105363(2021).

[7] Nowduri B, Schulte S, Decker D et al. Biomimetic nanostructures fabricated by nanoimprint lithography for improved cell-coupling[J]. Advanced Functional Materials, 30, 2004227(2020).

[8] Yang M Y, Xu K, Wang L. Flexible touch sensor fabricated by double-sided nanoimprint lithography metal transfer[J]. Nanotechnology, 31, 315302(2020).

[9] Zhang J, Ye S B, Liu H L et al. 3D printed piezoelectric BNNTs nanocomposites with tunable interface and microarchitectures for self-powered conformal sensors[J]. Nano Energy, 77, 105300(2020).

[10] Jambhulkar S, Xu W H, Franklin R et al. Integrating 3D printing and self-assembly for layered polymer/nanoparticle microstructures as high-performance sensors[J]. Journal of Materials Chemistry C, 8, 9495-9501(2020).

[11] Oladapo B I, Zahedi S A, Ismail S O et al. 3D printing of PEEK-cHAp scaffold for medical bone implant[J]. Bio-Design and Manufacturing, 4, 44-59(2021).

[12] Rad M R, Fahimipour F, Dashtimoghadam E et al. Osteogenic differentiation of adipose-derived mesenchymal stem cells using 3D-Printed PDLLA/β‑TCP nanocomposite scaffolds[J]. Bioprinting, 21, e00117(2021).

[13] Wang T, Yu W, Li C et al. Biomimetic compound eye with a high numerical aperture and anti-reflective nanostructures on curved surfaces[J]. Optics Letters, 37, 2397-2399(2012).

[14] Gao W, Zheng M L, Jin F et al. Fast fabrication of large-area two-dimensional micro/nanostructure by femtosecond laser[J]. Laser & Optoelectronics Progress, 57, 111421(2020).

[15] Wang Z, Nandyala D, Colosqui C E et al. Glass surface micromachining with simultaneous nanomaterial deposition by picosecond laser for wettability control[J]. Applied Surface Science, 546, 149050(2021).

[16] Wang C. Research on controllable manufacturing method and triboelectric performance of micro-nano composite multistage structure[D], 11-24(2020).

[17] Chen X L, Xiong J Q, Parida K et al. Transparent and stretchable bimodal triboelectric nanogenerators with hierarchical micro-nanostructures for mechanical and water energy harvesting[J]. Nano Energy, 64, 103904(2019).

[18] Lü T, Cheng Z J, Zhang D J et al. Superhydrophobic surface with shape memory micro/nanostructure and its application in rewritable chip for droplet storage[J]. ACS Nano, 10, 9379-9386(2016).

[19] Chen G D, Zhang Z N, Li S K et al. Study on deep ultraviolet computational lithography techniques[J]. Laser & Optoelectronics Progress, 59, 0922007(2022).

[20] Zhang Z N, Li S K, Wang X Z et al. Fast mask optimization method for extreme ultraviolet lithography[J]. Acta Optica Sinica, 42, 1305002(2022).

[21] Zhang Z N, Li S K, Wang X Z. Research progress on the imaging of three-dimensional mask for extreme ultraviolet lithography[J]. Laser & Optoelectronics Progress, 59, 0922021(2022).

[22] Ma X, Zhang S E, Pan Y H et al. Research and progress of computational lithography[J]. Laser & Optoelectronics Progress, 59, 0922008(2022).

[23] Zhang D Y, Xing W Q, Li W R et al. Fabrication of multiple parallel microchannels in a single microgroove via the heating assisted MIMIC technique[J]. Micromachines, 13, 364(2022).

[24] Li M J. Research on simulation of proximity UV-lithography[D], 52-57(2007).

[25] Tang X G. Research on optical lithography of thick film resists[D], 90-102(2006).