Fig. 1. Schematic diagram of nano tree-dimensional (3D) imaging system

Fig. 2. Schematic diagram of two X-ray beams recording two projections of the same object

Fig. 3. Schematic diagram of coordinate system for obtaining sample depth information from X-ray stereo image

Fig. 4. Flow chart of stereo reconstruction algorithm

Fig. 5. Simulated spiral images. (a) Initial acquisition projection; (b) acquisition projection after rotating θ; (c) top view

Fig. 6. Depth image obtained by NCC algorithm

Fig. 7. Comparison between depth obtained by NCC algorithm and real depth

Fig. 8. Resolution target images. (a) -10° projection image; (b) +10° projection image; (c) parallax map

Fig. 9. Resolution target reconstruction results. (a) Depth map; (b) 3D view; (c) SEM image

Fig. 10. Chip images. (a) Chip samples under optical microscope; (b) -10° projection image; (c) +10° projection image

Fig. 11. Chip sample reconstruction results. (a) Parallax map; (b) depth map; (c) 3D view