X-Ray Nano-Resolution Stereo Imaging and Its Application in Chip Characterization

Cong Liu; Feixiang Wang; Fen Tao; Guohao Du; Ling Zhang; Jun Wang; Biao Deng

doi:10.3788/AOS240575

Acta Optica Sinica, Volume. 44, Issue 13, 1334002(2024)

X-Ray Nano-Resolution Stereo Imaging and Its Application in Chip Characterization

Cong Liu^1,2, Feixiang Wang^2、*, Fen Tao², Guohao Du², Ling Zhang², Jun Wang², and Biao Deng^2、**

Author Affiliations

¹School of Microelectronics, Shanghai University, Shanghai 200444, China

²Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

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Cong Liu, Feixiang Wang, Fen Tao, Guohao Du, Ling Zhang, Jun Wang, Biao Deng. X-Ray Nano-Resolution Stereo Imaging and Its Application in Chip Characterization[J]. Acta Optica Sinica, 2024, 44(13): 1334002

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Paper Information

Category: X-Ray Optics

Received: Jan. 26, 2024

Accepted: Mar. 18, 2024

Published Online: Jul. 4, 2024

The Author Email: Feixiang Wang (wangfx@sari.ac.cn), Biao Deng (dengb@sari.ac.cn)

DOI:10.3788/AOS240575

CSTR:32393.14.AOS240575

Topics

laser devices and laser physics

Lasers and Laser Optics

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laser manufacturing

Instrumentation, Measurement and Metrology