Chinese Journal of Lasers, Volume. 49, Issue 22, 2200002(2022)

Research Progress in Ultrafast Laser Processing of Titanium Dioxide Micro/nano Structures and Functional Devices

Ming Qiao1,2, Jianfeng Yan1,2、*, Jiachen Yu1,2, Jiaqun Li1,2, and Liangti Qu3
Author Affiliations
  • 1Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
  • 2State Key Laboratory of Tribology, Beijing 100084, China
  • 3Department of Chemistry, Tsinghua University, Beijing 100084, China
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    Figures & Tables(11)
    Applications of TiO2 micro/nano structures and functional devices in energy materials and optical information fields
    Three crystal types of titanium dioxide. (a) Rutile; (b) anatase; (c) brookite
    Improving photochemistry performance of TiO2 by different methods. (a) Reducing band gap[4]; (b) preparation of functional surface structures[2]
    Schematics of TiO2 micro/nano structures processed using ultrafast laser. (a) Ultrafast laser ablation of material surface; (b) ultrafast laser induced periodic surface structure; (c) ultrafast laser induced phase transformation of TiO2;(d) TiO2 formation by ultrafast laser induced titanium oxidation
    Experimental and theoretical results of ultrafast laser ablation of TiO2[53]. (a) Optical microscope image of TiO2 surface ablated using ultrafast laser with different pulse delays and laser energy fluxes; (b) distribution of free electron density calculated under different laser parameters; temporal dynamics of (c) laser intensity, calculated electron density, and (d) reflectivity of TiO2
    Obtaining anatase with highly active crystal facets by femtosecond laser induced phase transformation of TiO2 nanotubes[47]. (a) Phase transformation diagrams of amorphous TiO2 nanotubes induced by femtosecond laser; (b) comparison of TiO2 phase transformations induced by femtosecond laser and heat treatment; (c)-(f) high resolution transmission electron microscopy images of TiO2 nanotubes after femtosecond laser-induced phase transformation
    Fabricating patterned TiO2 nanostructures by ultrafast laser-induced oxidation of titanium[48]. (a) Schematic of ultrafast laser-induced oxidation of titanium; (b)(c) micro/nano patterns processed by ultrafast laser-induced oxidation of titanium
    Schematic of photoelectrochemistry water-splitting using TiO2[47]
    Photoelectrochemistry (PEC) performances of devices prepared using ultrafast laser[47]. (a) Photocurrent density observed using chopped illumination; (b) photoluminescence spectra of photoelectrodes; (c) schematic of PEC water- splitting; (d) conceptual schematics of high-resolution patterned photoelectrode for PEC water-splitting
    Fabrication of grating-type TiO2 nanostructures and realization of patterned structure color [48]. (a) Schematic of proposed surface coloring; (b) color palettes with grating period of 500-1000 nm; (c) electron microscope image, (d) dark field microscope image and (e) local magnification of butterfly pattern composed of grating-type nanostructures; (f) dark field optical microscope images of grating-type nanostructures for resolution test; (g) measured gray values of neighboring nanostructures with periods of 600 nm, 800 nm and 1000 nm along y direction, respectively
    Optical encryption based on anisotropic optical behavior of grating-type TiO2 nanostructures[48]. (a) Decryption schematic of two hidden images by illumination from different directions; (b)-(k) decrypting hidden images by using directional dark field mode
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    Ming Qiao, Jianfeng Yan, Jiachen Yu, Jiaqun Li, Liangti Qu. Research Progress in Ultrafast Laser Processing of Titanium Dioxide Micro/nano Structures and Functional Devices[J]. Chinese Journal of Lasers, 2022, 49(22): 2200002

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    Paper Information

    Category: reviews

    Received: Feb. 28, 2022

    Accepted: Apr. 21, 2022

    Published Online: Nov. 9, 2022

    The Author Email: Yan Jianfeng (yanjianfeng@tsinghua.edu.cn)

    DOI:10.3788/CJL202249.2200002

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