Research Progress in Ultrafast Laser Processing of Titanium Dioxide Micro/nano Structures and Functional Devices

Ming Qiao; Jianfeng Yan; Jiachen Yu; Jiaqun Li; Liangti Qu

doi:10.3788/CJL202249.2200002

Chinese Journal of Lasers, Volume. 49, Issue 22, 2200002(2022)

Research Progress in Ultrafast Laser Processing of Titanium Dioxide Micro/nano Structures and Functional Devices

Ming Qiao^1,2, Jianfeng Yan^1,2、*, Jiachen Yu^1,2, Jiaqun Li^1,2, and Liangti Qu³

Author Affiliations

¹Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

²State Key Laboratory of Tribology, Beijing 100084, China

³Department of Chemistry, Tsinghua University, Beijing 100084, China

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Ming Qiao, Jianfeng Yan, Jiachen Yu, Jiaqun Li, Liangti Qu. Research Progress in Ultrafast Laser Processing of Titanium Dioxide Micro/nano Structures and Functional Devices[J]. Chinese Journal of Lasers, 2022, 49(22): 2200002

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Paper Information

Category: reviews

Received: Feb. 28, 2022

Accepted: Apr. 21, 2022

Published Online: Nov. 9, 2022

The Author Email: Yan Jianfeng (yanjianfeng@tsinghua.edu.cn)

DOI:10.3788/CJL202249.2200002

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology