Chinese Journal of Lasers, Volume. 49, Issue 22, 2202009(2022)
High-Speed Parallel Two-Photon Laser Direct Writing Lithography System
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Hongqing Wang, Jisen Wen, Zhenyao Yang, Mengbo Tang, Qiuyuan Sun, Chengpeng Ma, Ziang Wang, Lanxin Zhan, Xiaoyi Zhang, Chun Cao, Xiaoming Shen, Chenliang Ding, Cuifang Kuang. High-Speed Parallel Two-Photon Laser Direct Writing Lithography System[J]. Chinese Journal of Lasers, 2022, 49(22): 2202009
Category: laser manufacturing
Received: Jan. 17, 2022
Accepted: Mar. 9, 2022
Published Online: Nov. 9, 2022
The Author Email: Ding Chenliang (dingcl@zhejianglab.com), Kuang Cuifang (cfkuang@zju.edu.cn)