Chinese Journal of Lasers, Volume. 50, Issue 18, 1804001(2023)

Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View

Xing Zhou1, Shumin Wang1, Shucheng Xu1, Jianqiu Ma1, Lihua Lei2, Zhishan Gao1, and Qun Yuan、*
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu, China
  • 2Shanghai Institute of Metrology and Testing Technology, Shanghai 201203, China
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    Xing Zhou, Shumin Wang, Shucheng Xu, Jianqiu Ma, Lihua Lei, Zhishan Gao, Qun Yuan. Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View[J]. Chinese Journal of Lasers, 2023, 50(18): 1804001

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    Paper Information

    Category: Measurement and metrology

    Received: Oct. 31, 2022

    Accepted: Nov. 21, 2022

    Published Online: Sep. 12, 2023

    The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

    DOI:10.3788/CJL221377

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