Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View

Xing Zhou; Shumin Wang; Shucheng Xu; Jianqiu Ma; Lihua Lei; Zhishan Gao; Qun Yuan

doi:10.3788/CJL221377

Chinese Journal of Lasers, Volume. 50, Issue 18, 1804001(2023)

Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View

Xing Zhou¹, Shumin Wang¹, Shucheng Xu¹, Jianqiu Ma¹, Lihua Lei², Zhishan Gao¹, and Qun Yuan^、*

¹School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu, China

²Shanghai Institute of Metrology and Testing Technology, Shanghai 201203, China

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Xing Zhou, Shumin Wang, Shucheng Xu, Jianqiu Ma, Lihua Lei, Zhishan Gao, Qun Yuan. Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View[J]. Chinese Journal of Lasers, 2023, 50(18): 1804001

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Paper Information

Category: Measurement and metrology

Received: Oct. 31, 2022

Accepted: Nov. 21, 2022

Published Online: Sep. 12, 2023

The Author Email: Qun Yuan (yuanqun@njust.edu.cn)

DOI:10.3788/CJL221377

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology