Fig. 1. Interference structures diagrams. (a) Mirau interference structure; (b) Fizeau interference structure; (c) interference cavity structure combining Mireau and Fizeau types

Fig. 2. Optical structure of large field-of-view broadband optical interferometer system

Fig. 3. Conjugation diagram of illumination module

Fig. 4. Structure diagram of collimator

Fig. 5. Spot diagram of collimating lens

Fig. 6. Structure diagram of illumination module

Fig. 7. Structure diagram of the imaging lens

Fig. 8. Distortion of the imaging section

Fig. 9. Spot diagram of the imaging section

Fig. 10. MTF of the imaging section

Fig. 11. System diagram of broadband optical interferometer

Fig. 12. Test result of the resolution board. (a) Resolution test results graph; (b) three-dimensional morphology

Fig. 13. Test result of 7.805 μm standard step plate sample. (a) Two-dimensional morphology; (b) X-directional contour line

Fig. 14. Test result of 46.554 μm standard step plate sample. (a) Two-dimensional morphology; (b) X-directional contour line