Fig. 1. Schematics of illumination system including finger array uniformity corrector. (a) Schematic of photolithography illumination system; (b) schematic of integral uniformity corrector for illumination system

Fig. 2. Schematic of illumination field point at the focal plane of condenser lens group and its corresponding spread area at the adjustment plane (e.g. conventional illumination mode)

Fig. 3. Schematic of relationship between fingers and pupil shape area in the correction plane

Fig. 4. Schematic of shape and layout of fingers in general finger array correction method

Fig. 5. Schematics of adjustment process for general finger array correction methods. (a) Uncorrected illumination filed; (b) corrected by one pair of fingers; (c) corrected by two pairs of fingers

Fig. 6. Schematics of adjustment process for uniformity correction method with staggered fingers. (a) Uncorrected illumination filed; (b)-(g) single corrected process

Fig. 7. Schematics of structure of finger fore-end

Fig. 8. Schematics of correction effect of different structures of finger fore-end. (a) Chamfer rectangle; (b) circle rectangle

Fig. 9. Schematic of adjustment for uniformity correction method with staggered and chamfered fingers

Fig. 10. Schematic of adjustment for uniformity correction method with staggered, chamfered and double layout fingers

Fig. 11. Simulation model of 65 nm node lithography illumination system

Fig. 12. Layoutstructure of staggered fingers

Fig. 13. Layout structure of staggered and chamfered fingers

Fig. 14. Integral uniformity distributions adjusted by different fingers arrangements. (a) Conventional illumination mode with σ=0.15; (b) conventional illumination mode with σ=0.93; (c) annular illumination mode with σin=0.16 and σout=0.36; (d) annular illumination mode with σin=0.76 and σout=0.96

Fig. 15. Layoutstructure of staggered, chamfered and double layout fingers

Fig. 16. Integral uniformity distributions adjusted by staggered, chamfered and double layout fingers arrangement. (a) Conventional illumination mode with σ=0.15; (b) conventional illumination mode with σ=0.93; (c) annular illumination mode with σin=0.16 and σout=0.36; (d) annular illumination mode with σin=0.76 and σout=0.96