Laser & Optoelectronics Progress, Volume. 61, Issue 21, 2100001(2024)

Progress in Inverse Lithography Technology

Futian Wang*... Juan Wei, Cuixiang Wang, Miao Jiang, Yu Mu, Chunlong Yu, Ruihua Liu, Fu Li, Jingjing Fan, Jinlai Liu, Jingkang Qin, Enqiang Tian, Song Sun, Chong Wang, Xiaonan Liu, Hao Yang, Di Liang, Binbin Yan, Liang Li, Qingchen Cao and Jiangliu Shi |Show fewer author(s)
Author Affiliations
  • Lithography Research and Development Department, Beijing Superstring Academy of Memory Technology, Beijing 100176, China
  • show less
    References(95)

    [1] Wei Y Y[M]. Theory and application of advanced lithography for VLSI(2016).

    [6] Wei Y Y, Li Y J, Dong L S et al[M]. Computational lithography and layout optimization, 107-109(2021).

    [7] Peng D P, Wu S J, Yu J C et al. Curvilinear mask: bridging ILT to HVM[J]. Proceedings of SPIE, 12495, 124950I(2023).

    [60] Figueiro T R. Process modeling for proximity effect correction in electron beam lithography[D](2015).

    [62] Yao W Z, Xu H C, Zhao H J et al. An“autonomously controlled" electronic design automation software HNU-EBL for electron beam lithography[J]. Journal of Hunan University(Natural Sciences), 49, 183-191(2022).

    [64] Cook B D. PYRAMID: a hierarchical, rule-based proximity effect correction scheme for electron beam lithography[D](1996).

    Tools

    Get Citation

    Copy Citation Text

    Futian Wang, Juan Wei, Cuixiang Wang, Miao Jiang, Yu Mu, Chunlong Yu, Ruihua Liu, Fu Li, Jingjing Fan, Jinlai Liu, Jingkang Qin, Enqiang Tian, Song Sun, Chong Wang, Xiaonan Liu, Hao Yang, Di Liang, Binbin Yan, Liang Li, Qingchen Cao, Jiangliu Shi. Progress in Inverse Lithography Technology[J]. Laser & Optoelectronics Progress, 2024, 61(21): 2100001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Reviews

    Received: Jul. 12, 2024

    Accepted: Aug. 20, 2024

    Published Online: Nov. 19, 2024

    The Author Email:

    DOI:10.3788/LOP241676

    CSTR:32186.14.LOP241676

    Topics