Acta Optica Sinica, Volume. 30, Issue 6, 1835(2010)

Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry

Luo Zhenyue*, Xue Hui, Zhang Shuna, Shen Weidong, Gu Peifu, and Zhang Yueguang
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    References(16)

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    [2] Xiao Qing, Wang Xinglong, Fu Qian, Zhang Dalong, Liu Xia, Deng Jianqin, Cao Dingxiang. An Optical Device for On-Line Measurement of Thickness[J]. Acta Optica Sinica, 2015, 35(2): 223002

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    Luo Zhenyue, Xue Hui, Zhang Shuna, Shen Weidong, Gu Peifu, Zhang Yueguang. Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry[J]. Acta Optica Sinica, 2010, 30(6): 1835

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    Paper Information

    Category: Thin Films

    Received: Jun. 10, 2009

    Accepted: --

    Published Online: Jun. 7, 2010

    The Author Email: Zhenyue Luo (surpassluo@hotmail.com)

    DOI:10.3788/aos20103006.1835

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