Acta Optica Sinica, Volume. 30, Issue 6, 1835(2010)

Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry

Luo Zhenyue*, Xue Hui, Zhang Shuna, Shen Weidong, Gu Peifu, and Zhang Yueguang
Author Affiliations
  • [in Chinese]
  • show less
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Luo Zhenyue, Xue Hui, Zhang Shuna, Shen Weidong, Gu Peifu, Zhang Yueguang. Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry[J]. Acta Optica Sinica, 2010, 30(6): 1835

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Jun. 10, 2009

    Accepted: --

    Published Online: Jun. 7, 2010

    The Author Email: Zhenyue Luo (surpassluo@hotmail.com)

    DOI:10.3788/aos20103006.1835

    Topics