Acta Optica Sinica, Volume. 30, Issue 6, 1835(2010)
Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry
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Luo Zhenyue, Xue Hui, Zhang Shuna, Shen Weidong, Gu Peifu, Zhang Yueguang. Novel Algorithm for Retrieve Thin Film Reflection Phase and Physical Thickness from White-Light Interferometry[J]. Acta Optica Sinica, 2010, 30(6): 1835
Category: Thin Films
Received: Jun. 10, 2009
Accepted: --
Published Online: Jun. 7, 2010
The Author Email: Zhenyue Luo (surpassluo@hotmail.com)