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Acta Optica Sinica, Volume. 37, Issue 12, 1231001(2017)

Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering

Wenjia Yuan, Weidong Shen*, Xiaowen Zheng, Chenying Yang, Yueguang Zhang, Bo Fang, Wen Mu, Chaonan Chen, and Xu Liu
Author Affiliations
  • State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China
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    Article index updated: Mar. 10, 2025

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    Wenjia Yuan, Weidong Shen, Xiaowen Zheng, Chenying Yang, Yueguang Zhang, Bo Fang, Wen Mu, Chaonan Chen, Xu Liu. Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering[J]. Acta Optica Sinica, 2017, 37(12): 1231001

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    Paper Information

    Category: Thin Films

    Received: Jul. 3, 2017

    Accepted: --

    Published Online: Sep. 6, 2018

    The Author Email: Shen Weidong (adongszju@hotmail.com)

    DOI:10.3788/AOS201737.1231001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology