Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching

Hangjian Zhang; Boning Pang; Dahuai Zheng; Hongyun Chen; Hongliang Liu

doi:10.3788/CJL240644

Chinese Journal of Lasers, Volume. 51, Issue 18, 1801006(2024)

Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching

Hangjian Zhang¹, Boning Pang¹, Dahuai Zheng³, Hongyun Chen⁴, and Hongliang Liu^1,2、*

¹Tianjin Key Laboratory of Micro-Scale Optical Information Science and Technology, Institute of Modern Optics, Nankai University, Tianjin 300350, China

²State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, Zhejiang , China

³School of Physical Sciences, Nankai University, Tianjin 300071, China

⁴School of Materials Science and Engineering, Nankai University, Tianjin 300350, China

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References(20)

[1] Dammann H, Görtler K. High-efficiency in-line multiple imaging by means of multiple phase holograms[J]. Optics Communications, 3, 312-315(1971).

[2] Li J Q, Yan J F, Jiang L et al. Nanoscale multi-beam lithography of photonic crystals with ultrafast laser[J]. Light: Science & Applications, 12, 164(2023).

[3] Miao D, Zhao Y Y, Cai S C et al. Generating an M2×N2 spot array with a dual-period hybrid Dammann grating fabricated using maskless projection lithography[J]. Optics Letters, 48, 3087-3090(2023).

[4] Tang F C, Bu Y, Wu F et al. Snapshot stokes polarimetry method based on dammann grating[J]. Acta Optica Sinica, 43, 1312002(2023).

[5] Liu J X, Zhang H J, Ai S W et al. New channel guiding structures via femtosecond laser direct writing z-cut LiNbO3 crystals[J]. Results in Physics, 57, 107379(2024).

[6] Wang P, Qi J, Liu Z M et al. Fabrication of polarization-independent waveguides deeply buried in lithium niobate crystal using aberration-corrected femtosecond laser direct writing[J]. Scientific Reports, 7, 41211(2017).

[7] Liu H L, Li Y B, Yang Q X et al. A tailored 100%-efficient 532/1064-nm demultiplexer in y-cut LiNbO3 crystal[J]. Optics Letters, 48, 787-790(2023).

[8] Lu J F, Tian J, Poumellec B et al. Tailoring chiral optical properties by femtosecond laser direct writing in silica[J]. Light: Science & Applications, 12, 46(2023).

[9] Liu H L, Chen Z X, Ren Y Y. Direct-writing of cladding waveguide in PMNPT crystal by femtosecond laser micromachining[J]. Optical Materials Express, 12, 240-246(2022).

[10] Tan D Z, Wang Z, Xu B B et al. Photonic circuits written by femtosecond laser in glass: improved fabrication and recent progress in photonic devices[J]. Advanced Photonics, 3, 024002(2021).

[11] Juodkazis S, Nishimura K, Misawa H et al. Control over the crystalline state of sapphire[J]. Advanced Materials, 18, 1361-1364(2006).

[12] Liu X Q, Chen Q D, Guan K M et al. Dry-etching-assisted femtosecond laser machining[J]. Laser & Photonics Reviews, 11, 1600115(2017).

[13] Wu R B, Wang M, Xu J et al. Long low-loss-litium niobate on insulator waveguides with sub-nanometer surface roughness[J]. Nanomaterials, 8, 910(2018).

[14] Gao R H, Zhang H S, Bo F et al. Broadband highly efficient nonlinear optical processes in on-chip integrated lithium niobate microdisk resonators of Q-factor above 108[J]. New Journal of Physics, 23, 123027(2021).

[15] Cheng Y. Thin film lithium niobate electro-optic devices and ultralarge-scale photonic integration(invited)[J]. Chinese Journal of Lasers, 51, 0119001(2024).

[16] Lei T, Zhang M, Li Y R et al. Massive individual orbital angular momentum channels for multiplexing enabled by Dammann gratings[J]. Light: Science & Applications, 4, e257(2015).

[17] Zhu S J, Wang L, Shi H et al. Fabricating and testing of metasurface silicon polarization beam splitters[J]. Acta Optica Sinica, 44, 1923001(2024).

[18] Liu X Q, Yu L, Yang S N et al. Optical nanofabrication of concave microlens arrays[J]. Laser & Photonics Reviews, 13, 1800272(2019).

[19] Yang Y, Li H, Liu H G et al. Highly efficient nonlinear vortex beam generation by using a compact nonlinear fork grating[J]. Optics Letters, 48, 6376-6379(2023).

[20] Tan X, Jiao Q B, Qi X D et al. Fabrication of high-efficiency and low-stray-light grating by inductively coupled plasma(ICP) etching-polishing method[J]. Optics Express, 24, 5896-5910(2016).

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Hangjian Zhang, Boning Pang, Dahuai Zheng, Hongyun Chen, Hongliang Liu. Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching[J]. Chinese Journal of Lasers, 2024, 51(18): 1801006

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Paper Information

Category: laser devices and laser physics

Received: Mar. 4, 2024

Accepted: May. 31, 2024

Published Online: Sep. 6, 2024

The Author Email: Liu Hongliang (drliuhl@nankai.edu.cn)

DOI:10.3788/CJL240644

CSTR:32183.14.CJL240644

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology