Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching

Hangjian Zhang; Boning Pang; Dahuai Zheng; Hongyun Chen; Hongliang Liu

doi:10.3788/CJL240644

Chinese Journal of Lasers, Volume. 51, Issue 18, 1801006(2024)

Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching

Hangjian Zhang¹, Boning Pang¹, Dahuai Zheng³, Hongyun Chen⁴, and Hongliang Liu^1,2、*

¹Tianjin Key Laboratory of Micro-Scale Optical Information Science and Technology, Institute of Modern Optics, Nankai University, Tianjin 300350, China

²State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, Zhejiang , China

³School of Physical Sciences, Nankai University, Tianjin 300071, China

⁴School of Materials Science and Engineering, Nankai University, Tianjin 300350, China

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Hangjian Zhang, Boning Pang, Dahuai Zheng, Hongyun Chen, Hongliang Liu. Fabrication of Dammann Grating Devices Using Femtosecond Laser Direct Writing Assisted by Plasma Etching[J]. Chinese Journal of Lasers, 2024, 51(18): 1801006

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Paper Information

Category: laser devices and laser physics

Received: Mar. 4, 2024

Accepted: May. 31, 2024

Published Online: Sep. 6, 2024

The Author Email: Hongliang Liu (drliuhl@nankai.edu.cn)

DOI:10.3788/CJL240644

CSTR:32183.14.CJL240644

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology