Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312011(2023)

Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing

Shanyong Chen1,2, Shuai Xue1,2, Yupeng Xiong1,2, Xiaoqiang Peng1,2, and Yifan Dai1,2、*
Author Affiliations
  • 1Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China
  • 2Key Laboratory of Ultra-Precision Machining Technology of Hunan Province, Changsha 410073, Hunan, China
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    Figures & Tables(16)
    CGH null test of freeform surface. (a) Test layout; (b) test surface and result; (c) CGH patterns and diffraction structures; (d) test system[13]
    Ghost disturbance in CGH null test. (a) Test layout for a cylinder with tilt carrier[17]; (b) ghost fringe resulted from reflection of CGH in null test of a cylinder[17]; (c) ghost fringe resulted from reflection of CGH in null test of an on-axis asphere
    Linear mapping between pixels on the imaging plane and transverse coordinates on the virtual RS instead of the CGH plane[23]
    Mapping distortion correction for CGH null test of a parabolic surface with large off-axis paraboloid[23]
    Traceability chain of CGH null test[24]
    CGH cross test with a calibrated sphere
    Three-step absolute test of cylinders. (a) W1; (b) W2; (c) W3[17]
    CGH multiplexing techniques for absolute test of aspheres. (a) Twin-CGH[35]; (b) radial shearing[38]
    Subaperture stitching with CGHs for measuring large convex aspheres. (a) Near-null test[39-41]; (b) null test[42]
    CGH null test of an even asphere with large aspheric departure (3.56 mm)
    Failure cases of CGH null test. (a) Impractical size of CGH required; (b) gull-wing asphere; (c) stitching-based interference microscopy[46]
    Comparative test of a gull-wing asphere. (a) Stitching interference microscopy; (b) CGH null test; (c) null fringe interference pattern for CGH null test; (d) full aperture surface error (RMS 60.9 nm) obtained by stitching interference microscopy; (e) central convex part of stitched map (RMS 24.9 nm); (f) central convex part of CGH null test (RMS 21.8 nm)[46]
    Sharing CGH null test for simultaneous measurement of primary and tertiary mirrors. (a) Without pattern overlap; (b) with pattern overlap
    Subaperture test enabling resolving local big error. (a) Irresolvable full aperture fringes; (b) data loss in full aperture measurement; (c) reconstructed surface error by subaperture stitching
    SLM-based adaptive null interferometry. (a) Unknown surface reconstruction based on iterative close-loop control of the SLM phase function[55]; (b) fringe reduction from invisible to null fringe states[55]; (c) measurement of bi-conic Zernike surface (setup, freeform departure, and point-to-point difference of 0.039λ RMS from cross test)[54]; (d) hybrid refractive and diffractive null combining the SLM with high order even asphere singlet can be adapted to a large range of freeform aberrations[57]
    In-situ CGH null test integrated on an ultra-precision turning machine. (a) System setup[65]; (b) simultaneous measurement of mirror surfaces S1 and S3[65]; (c) machined surfaces S1 and S3 sharing the same substrate[66]
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    Shanyong Chen, Shuai Xue, Yupeng Xiong, Xiaoqiang Peng, Yifan Dai. Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312011

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 22, 2022

    Accepted: Oct. 17, 2022

    Published Online: Feb. 22, 2023

    The Author Email: Yifan Dai (dyf@nudt.edu.cn)

    DOI:10.3788/LOP222608

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