Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312011(2023)
Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing
Fig. 1. CGH null test of freeform surface. (a) Test layout; (b) test surface and result; (c) CGH patterns and diffraction structures; (d) test system[13]
Fig. 3. Linear mapping between pixels on the imaging plane and transverse coordinates on the virtual RS instead of the CGH plane[23]
Fig. 4. Mapping distortion correction for CGH null test of a parabolic surface with large off-axis paraboloid[23]
Fig. 10. CGH null test of an even asphere with large aspheric departure (3.56 mm)
Fig. 11. Failure cases of CGH null test. (a) Impractical size of CGH required; (b) gull-wing asphere; (c) stitching-based interference microscopy[46]
Fig. 12. Comparative test of a gull-wing asphere. (a) Stitching interference microscopy; (b) CGH null test; (c) null fringe interference pattern for CGH null test; (d) full aperture surface error (RMS 60.9 nm) obtained by stitching interference microscopy; (e) central convex part of stitched map (RMS 24.9 nm); (f) central convex part of CGH null test (RMS 21.8 nm)[46]
Fig. 13. Sharing CGH null test for simultaneous measurement of primary and tertiary mirrors. (a) Without pattern overlap; (b) with pattern overlap
Fig. 14. Subaperture test enabling resolving local big error. (a) Irresolvable full aperture fringes; (b) data loss in full aperture measurement; (c) reconstructed surface error by subaperture stitching
Fig. 15. SLM-based adaptive null interferometry. (a) Unknown surface reconstruction based on iterative close-loop control of the SLM phase function[55]; (b) fringe reduction from invisible to null fringe states[55]; (c) measurement of bi-conic Zernike surface (setup, freeform departure, and point-to-point difference of 0.039λ RMS from cross test)[54]; (d) hybrid refractive and diffractive null combining the SLM with high order even asphere singlet can be adapted to a large range of freeform aberrations[57]
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Shanyong Chen, Shuai Xue, Yupeng Xiong, Xiaoqiang Peng, Yifan Dai. Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312011
Category: Instrumentation, Measurement and Metrology
Received: Sep. 22, 2022
Accepted: Oct. 17, 2022
Published Online: Feb. 22, 2023
The Author Email: Yifan Dai (dyf@nudt.edu.cn)