Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing

Shanyong Chen; Shuai Xue; Yupeng Xiong; Xiaoqiang Peng; Yifan Dai

doi:10.3788/LOP222608

Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312011(2023)

Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing

Shanyong Chen^1,2, Shuai Xue^1,2, Yupeng Xiong^1,2, Xiaoqiang Peng^1,2, and Yifan Dai^1,2、*

¹Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China

²Key Laboratory of Ultra-Precision Machining Technology of Hunan Province, Changsha 410073, Hunan, China

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Shanyong Chen, Shuai Xue, Yupeng Xiong, Xiaoqiang Peng, Yifan Dai. Research Progress of Ultra-Precision Measurement of Optical Surfaces for Manufacturing[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312011

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Sep. 22, 2022

Accepted: Oct. 17, 2022

Published Online: Feb. 22, 2023

The Author Email: Yifan Dai (dyf@nudt.edu.cn)

DOI:10.3788/LOP222608

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology