[1] Huang Q S, Qi R Z, Zhang Z et al. Development of high performance and large size X-ray multilayer reflective optics[J]. Optics and Precision Engineering, 30, 2793-2804(2022).

[2] Wang H C, Moriconi S, Sawhney K. Nano-precision metrology of X-ray mirrors with laser speckle angular measurement[J]. Light: Science & Applications, 10, 195(2021).

[3] Chen Y F. Recent progress in nanofabrication of high resolution X-ray zone plate lenses by electron beam lithography[J]. Acta Optica Sinica, 42, 1134005(2022).

[4] Wu L J, Wen Q T, Gao Y Z et al. Investigation on the preparation of high precision multilayer X-ray Fresnel zone plates based on atomic layer deposition technology[J]. Acta Photonica Sinica, 50, 0123001(2021).

[5] Sun T X. Capillary X-ray lens technology and its applications[J]. Acta Optica Sinica, 42, 1134002(2022).

[6] Tan M S, Ming S Q, Wu Y F et al. Preparation of X-ray Fresnel zone plate by atomic layer deposition and focused ion beam slicing[J]. Acta Optica Sinica, 43, 1134001(2023).

[7] Tao F, Wang Y D, Ren Y Q et al. Design and detection of ellipsoidal mono-capillary for X-ray nano-imaging[J]. Acta Optica Sinica, 37, 1034002(2017).

[8] Burcklen C, de Rossi S, Meltchakov E et al. High-reflectance magnetron-sputtered scandium-based X-ray multilayer mirrors for the water window[J]. Optics Letters, 42, 1927-1930(2017).

[9] Wang G T, Wang D L, Cao J L et al. A new method of fabricating X-ray multilayer for long wavelength[J]. Journal of Applied Optics, 22, 34-39(2001).

[10] Dixit S N. Numerical modeling of suppression of stimulated Brillouin scattering due to finite laser bandwidth[J]. Proceedings of SPIE, 1626, 254-265(1992).

[11] Feng J T, Huang Q S, Qi R Z et al. Stability of Cr/C multilayer during synchrotron radiation exposure and thermal annealing[J]. Optics Express, 27, 38493-38508(2019).

[12] Wen M W, Huang Q S, Ma S et al. Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen[J]. Optics Express, 24, 27166-27176(2016).

[13] Qi R Z, Huang Q S, Fei J N et al. Evolution of the internal structure of short-period Cr/V multilayers with different vanadium layers thicknesses[J]. Materials, 12, 2936(2019).

[14] Huang Q S, Liu Y, Yang Y et al. Nitridated Ru/B4C multilayer mirrors with improved interface structure, zero stress, and enhanced hard X-ray reflectance[J]. Optics Express, 26, 21803-21812(2018).

[15] Liu Y, Huang Q S, Qi R Z et al. Microstructure evolution and hard X-ray reflectance of ultrathin Ru/C multilayer mirrors with different layer thicknesses[J]. Materials Research Express, 8, 026401(2021).

[16] Liao J C, Qian R, Chen D et al. Magnetron sputtering preparation and photoelectric property optimization of GAZO/Ag/GAZO transparent conductive thin films[J]. Laser & Optoelectronics Progress, 60, 0731002(2023).

[17] Zhang Y X, Huang Q S, Zhu Y F et al. Development of large-size high performance X-ray double-channel multilayer mirrors[J]. Acta Optica Sinica, 43, 0234001(2023).

[18] Sechrist Z A, Fabreguette F H, Heintz O et al. Optimization and structural characterization of W/Al2O3 nanolaminates grown using atomic layer deposition techniques[J]. Chemistry of Materials, 17, 3475-3485(2005).

[19] Fabreguette F H, Wind R A, George S M. Ultrahigh X-ray reflectivity from W/Al2O3 multilayers fabricated using atomic layer deposition[J]. Applied Physics Letters, 88, 013116(2006).

[20] Dai M. Investigation on fabrication and measurement of W/B4C multilayers[D], 6-8(2009).

[21] Parratt L G. Surface studies of solids by total reflection of X-rays[J]. Physical Review, 95, 359-369(1954).

[22] Romaine S E, Everett J E, Bruni R J et al. Characterization and multilayer coating of cylindrical x-ray optics for x-ray astronomy[J]. Proceedings of SPIE, 3444, 552-555(1998).

[23] Spiller E, Rosenbluth A E. Determination of thickness errors and boundary roughness from the measured performance of A multilayer coating[J]. Optical Engineering, 25, 954-963(1986).

[24] Suresh N, Phase D M, Gupta A et al. Electron density fluctuations at interfaces in Nb/Si bilayer, trilayer, and multilayer films: an X-ray reflectivity study[J]. Journal of Applied Physics, 87, 7946-7958(2000).

[25] Freitag J M, Clemens B M. Stress evolution in Mo/Si multilayers for high-reflectivity extreme ultraviolet mirrors[J]. Applied Physics Letters, 73, 43(1998).

[26] Guo Q H, Shen J J, Du H M et al. Structure and thermal stability of Mo/Al multilayers for soft X-ray mirrors[J]. Journal of Physics D: Applied Physics, 38, 1936-1942(2005).