Fig. 1. Structure diagram of HfO₂/Al₂O₃ multilayers

Fig. 2. Diagram of reflectance calculation for multilayers

Fig. 3. Relationship between reflectivity of multilayer films of different film systems and grazing angle of X-rays. (a) Changes in reflectivity of multilayer films of different film systems at grazing angles from 0° to 7°; (b) reflectivity of multilayer films of different film systems at primary diffraction peak

Fig. 4. Relationship between reflectivity of HfO₂/Al₂O₃ multilayer films with different periods and grazing angle of X-rays

Fig. 5. Variation of reflectivity of HfO₂/Al₂O₃ multilayers with duty ratio

Fig. 6. Variation of reflectivity of HfO₂/Al₂O₃ multilayers with number of periods

Fig. 7. Cross-sectional TEM images of HfO₂/Al₂O₃ multilayers. (a) Cross-sectional TEM image of 50 layers HfO₂/Al₂O₃ stack films; (b) TEM image after magnification

Fig. 8. X-ray reflectivity measurement and fitting results of HfO₂/Al₂O₃ multilayers