Chinese Journal of Lasers, Volume. 48, Issue 15, 1502001(2021)
Ultrafast Laser Nanojoining and Its Applications in the Manufacturing of Micro-Nano Devices
Fig. 1. Plasmonic effect in metal nanoparticles pair[29]. (a), (c), (e) Plasmonic effect in nanoparticles pair when incident laser polarization direction is parallel to the nanoparticles pair axis;(b), (d), (f) plasmonic effect in nanoparticles pair when incident laser polarization direction is perpendicular to the nanoparticles pair axis
Fig. 3. Morphology of Ag nanowire after femtosecond laser irradiation[33]. (a)Low laser energy input; (b) continuous laser energy input
Fig. 5. Transmission electron microscope images of femtosecond laser nanojoined joint[38]. (a), (b) Miscible metal nanoparticles pair; (c), (d) immiscible metal nanoparticles pair
Fig. 6. Femtosecond laser nanojoined metal-oxide nanowire heterogeneous joint[40]. (a), (b) Scanning electron microscope (SEM) images of nanojoined heterogeneous joint before and after strength test; (c), (d) transmission electron microscope images of nanojoined heterogeneous joint
Fig. 7. Schematic diagram of typical interconnection packaging structure. TIM represents thermal interface materials
Fig. 8. Nano-Ag film deposited via picosecond laser deposition and its application in low-temperature packaging and connection[25]. (a) PLD system and deposition process; (b) SEM image of nanoparticle structure in film; (c) schematic diagram of nanoparticle structure in Ag films; (d) schematic diagram of Ag nanoparticle film packaging application; (e) SEM image of low-temperature sintered joint cross section
Fig. 9. New CBLDN fabricated by ultrafast PLD[24]. (a) Schematic diagram of deposition mechanism and SEM image of CBLDN; (b) SEM image of loose structure; (c) SEM image of compact structure; (d) cooperative effect of the loose and the compact layers in low-temperature sintered process; (e) shear strength of low-temperature sintered joint; (f) resistivity of low-temperature sintered film; (g) comparison of the interconnecting performances of CBLDN before and after 4-month storage
Fig. 10. Fabrication of supersaturated Ag-Cu nanoalloy by ultrafast PLD and its sintered mechanism[26]
Fig. 11. Characterization of Ag-Pd nanoalloy sintered layer and its resistance to electrochemical migration[54]. (a)--(c) Sintered joint at 250 ℃; (d)--(f) sintered joint at 400 ℃; (g) shear strength and porosity of sintered joint; (h) current-time relationship in water drop experiment; (i) electrochemical migration experiment
Fig. 12. Nanojoined Ag nanowires for optical waveguides by femtosecond laser[36]. (a) Irradiation for 10 s at the laser power density of 90 mJ/cm2; (b) normalized electric field distribution of the device before nanojoining; (c) normalized electric field distribution of the device after nanojoining; (d) comparison of the transmission ratio before and after nanojoining
Fig. 13. Nanojoining of metal and TiO2 nanowires by femtosecond laser and its application in manufacture of nano-devices[40, 44-45]. (a) Schematic diagram of interconnection between Au electrodes and TiO2 nanowire; (b) controllable multi-level memory device based on Au-TiO2 interconnection; (c) rectification units based on Ag-TiO2 interconnection; (d) interconnection of Pt electrode and TiO2 nanowire; (e) RS behavior of Pt-TiO2 cell after nanojoining
Fig. 14. Nanojoining of metal electrode and SiC/SiO2 nanowire by femtosecond laser[41, 43]. (a) Partial thinning of SiO2 shell of SiC/SiO2 nanowire by laser to achieve nanojoining; (b) field effect transistor based on Au-SiC/SiO2; (c) electrical properties of nanojoined transistor; (d) memory unit based on Au-SiC/SiO2; (e) performance of memory unit before and after nanojoining
Fig. 15. Nanojoined composite structure of heterogeneous nanoparticle layer by picosecond laser deposition and its applications[55]. (a) Cu-FeOx nanojoined composite structure; (b) performance of nanojoined structures used for pressure sensing; (c) nanojoined structure used for airflow detection; (d) nanojoined structure used for pulse detection; (e) nanojoined structure used for detecting hand movements
Fig. 16. Nanojoined ZnO nanowires by femtosecond laser[42]. (a) Fabrication of homogeneous ZnO nanojoined structure; (b) electrical response of devices before and after nanojoining; (c) response of nanojoined device under photoexcitation at 594 nm; (d) response of nanojoined device under photoexcitation at 543 nm
Fig. 17. Selective doping and interface modification of SiC nanowire based on femtosecond laser[37]. (a) Fabrication of selective doping structure; (b) electrical response of device before laser irradiation; (c) electrical response of device after laser irradiation; (d) p-n junction fabricated after laser local irradiation
Fig. 18. Supercapacitor based on femtosecond laser LIFT technology[56]. (a) Fabrication of supercapacitor using LIFT; (b) energy storage capacity of device and its comparison with similar products; (c) designs of different micro-filters based on this structure; (d) input and output signals of filter
Fig. 19. New wireless packaging design of SiC diode connection and its high temperature reliability[57]. (a) Schematic diagram of wireless packaging structure; (b) schematic diagram of fabricated process of wireless packaging structure; (c) power cycling result of wireless packaging structure under high temperature; (d) comparison of power cycling results of wireless packaging structure with that of references; (e) temperature measurement results by thermal infrared imager
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Guisheng Zou, Luchan Lin, Yu Xiao, Zhongyang Deng, Qiang Jia, Bin Feng, Wengan Wang, Songling Xing, Hui Ren, Daozhi Shen, Lei Liu. Ultrafast Laser Nanojoining and Its Applications in the Manufacturing of Micro-Nano Devices[J]. Chinese Journal of Lasers, 2021, 48(15): 1502001
Category: laser manufacturing
Received: Apr. 7, 2021
Accepted: May. 6, 2021
Published Online: Jul. 16, 2021
The Author Email: Lei Liu (liulei@tsinghua.edu.cn)