Ultrafast Laser Nanojoining and Its Applications in the Manufacturing of Micro-Nano Devices

Guisheng Zou; Luchan Lin; Yu Xiao; Zhongyang Deng; Qiang Jia; Bin Feng; Wengan Wang; Songling Xing; Hui Ren; Daozhi Shen; Lei Liu

doi:10.3788/CJL202148.1502001

Chinese Journal of Lasers, Volume. 48, Issue 15, 1502001(2021)

Ultrafast Laser Nanojoining and Its Applications in the Manufacturing of Micro-Nano Devices

Guisheng Zou¹, Luchan Lin², Yu Xiao¹, Zhongyang Deng¹, Qiang Jia¹, Bin Feng¹, Wengan Wang¹, Songling Xing¹, Hui Ren¹, Daozhi Shen¹, and Lei Liu^1、*

Author Affiliations

¹State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

²Shanghai Key Laboratory of Materials Laser Processing and Modification, School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, China

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Guisheng Zou, Luchan Lin, Yu Xiao, Zhongyang Deng, Qiang Jia, Bin Feng, Wengan Wang, Songling Xing, Hui Ren, Daozhi Shen, Lei Liu. Ultrafast Laser Nanojoining and Its Applications in the Manufacturing of Micro-Nano Devices[J]. Chinese Journal of Lasers, 2021, 48(15): 1502001

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Paper Information

Category: laser manufacturing

Received: Apr. 7, 2021

Accepted: May. 6, 2021

Published Online: Jul. 16, 2021

The Author Email: Lei Liu (liulei@tsinghua.edu.cn)

DOI:10.3788/CJL202148.1502001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology