Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan1...2, Haibo Zhang1,2, Ren Ye1,2, Jun Zhou1,2,*, Yunrong Wei1,2, and Qihong Lou12 |Show fewer author(s)
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
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    References(26)

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    [12] K. Suzuki, B. W. Smith. Microlithography Science and Technology, 272(2007).

    [19] M. Blosser, X. L. Han, R. F. Garcia-Sanchez, P. Misra. Appl. Spectrosc. Sci. Nanomater., 2, 21(2015).

    [24] C. Li, L. Liu, X. Qiu, J. Wei, L. Deng, Y. Chen. Chin. Opt. Lett., 13, 013001(2015).