Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)
Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
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Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017)
Category: Lasers and Laser Optics
Received: Dec. 5, 2016
Accepted: Mar. 30, 2017
Published Online: Jul. 20, 2018
The Author Email: Jun Zhou (junzhousd@siom.ac.cn)