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Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)

Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp

Zhijun Yuan1,2, Haibo Zhang1,2, Ren Ye1,2, Jun Zhou1,2、*, Yunrong Wei1,2, and Qihong Lou1,2
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Shanghai Key Laboratory of All Solid-state Laser and Applied Techniques, Shanghai 201800, China
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    Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017)

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Dec. 5, 2016

    Accepted: Mar. 30, 2017

    Published Online: Jul. 20, 2018

    The Author Email: Jun Zhou (junzhousd@siom.ac.cn)

    DOI:10.3788/COL201715.071402

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology