Chinese Optics Letters, Volume. 15, Issue 7, 071402(2017)
Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
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Fig. 2. Experimental setup for wavelength calibration of the ArF laser. HCL, hollow cathode lamp; HV, high voltage; PC personal computer; HR, high-reflection mirror.
Fig. 3. Wavelength with the position of the laser spot on the LDA.
Fig. 6. OG signal amplitude at a different laser power and discharge current.
Fig. 7. OG signal amplitude recorded in the wavelength range of 193.38500–193.39500 nm.
Table 1. Key Parameters of the Wavelength Measurement
View tableView in ArticleTable 1. Key Parameters of the Wavelength Measurement
Parameters Values Diffraction order of the grating 90 Distance between groves (mm) 1/112.96 Diffraction angle of the grating (deg.) 79 Pixel length (μm) 25 Focal length (mm) 200
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Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017)
Paper Information
Category: Lasers and Laser Optics
Received: Dec. 5, 2016
Accepted: Mar. 30, 2017
Published Online: Jul. 20, 2018
The Author Email: Jun Zhou (junzhousd@siom.ac.cn)
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