Chinese Optics Letters, Volume. 17, Issue 9, 093102(2019)

Te-free SbBi thin film as a laser heat-mode photoresist

Kui Zhang1,2, Zhengwei Wang1,2, Guodong Chen1,2, Yang Wang1、*, Aijun Zeng1, Jing Zhu1, Syarhei Avakaw3, and Heorgi Tsikhanchuk3
Author Affiliations
  • 1Laboratory of Micro-Nano Optoelectronic Materials and Devices, Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3KBTEM-OMO Joint Stock Company, Minsk 220033, Republic of Belarus
  • show less
    References(35)

    [4] D. Lin, P. Fan, E. Hasman, M. L. Brongersma. Science, 345, 299(2014).

    [17] M. Kuwahara, C. Mihalcea, N. Atoda, J. Tominaga, H. Fuji, T. Kikukawa. Microelectron. Eng., 415, 61(2002).

    Cited By
    Tools

    Get Citation

    Copy Citation Text

    Kui Zhang, Zhengwei Wang, Guodong Chen, Yang Wang, Aijun Zeng, Jing Zhu, Syarhei Avakaw, Heorgi Tsikhanchuk, "Te-free SbBi thin film as a laser heat-mode photoresist," Chin. Opt. Lett. 17, 093102 (2019)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin films

    Received: Apr. 10, 2019

    Accepted: May. 23, 2019

    Posted: May. 27, 2019

    Published Online: Jul. 29, 2019

    The Author Email: Yang Wang (ywang@siom.ac.cn)

    DOI:10.3788/COL201917.093102

    Topics