Te-free SbBi thin film as a laser heat-mode photoresist

Kui Zhang; Zhengwei Wang; Guodong Chen; Yang Wang; Aijun Zeng; Jing Zhu; Syarhei Avakaw; Heorgi Tsikhanchuk

doi:10.3788/COL201917.093102

Chinese Optics Letters, Volume. 17, Issue 9, 093102(2019)

Te-free SbBi thin film as a laser heat-mode photoresist

Kui Zhang^1,2, Zhengwei Wang^1,2, Guodong Chen^1,2, Yang Wang^1、*, Aijun Zeng¹, Jing Zhu¹, Syarhei Avakaw³, and Heorgi Tsikhanchuk³

Author Affiliations

¹Laboratory of Micro-Nano Optoelectronic Materials and Devices, Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³KBTEM-OMO Joint Stock Company, Minsk 220033, Republic of Belarus

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Kui Zhang, Zhengwei Wang, Guodong Chen, Yang Wang, Aijun Zeng, Jing Zhu, Syarhei Avakaw, Heorgi Tsikhanchuk, "Te-free SbBi thin film as a laser heat-mode photoresist," Chin. Opt. Lett. 17, 093102 (2019)

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Paper Information

Category: Thin films

Received: Apr. 10, 2019

Accepted: May. 23, 2019

Posted: May. 27, 2019

Published Online: Jul. 29, 2019

The Author Email: Yang Wang (ywang@siom.ac.cn)

DOI:10.3788/COL201917.093102

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology