Fig. 1. Schematic of traditional relay system

Fig. 2. Schematic of dual 2D MEMS mirror scanning method

Fig. 3. The response of beam scanning angle versus the tilt angle of two MEMS mirrors. (a) X-direction; (b) Y-direction

Fig. 4. The relationship between the beam scanning angle and the tilt angle of the MEMS-2 and the d/l

Fig. 5. Zemax simulation diagrams. (a) Relay system composed of two AC127-025-A doublet lenses; (b) dual 2D MEMS mirror scanning system

Fig. 6. Optical aberration of two systems. (a) Field curvature and astigmatic aberrations; (b) chromatic focal shift; (c) wavefront error

Fig. 7. Configuration and simulation results of 25 scanning points with different scanning angles. (a) Scan point configuration; (b) spot diagram of dual 2D MEMS mirror scanning system; (c) spot diagram of traditional relay system

Fig. 8. The impact of MEMS mirror installation errors in traditional relay system

Fig. 9. The impact of MEMS mirror installation errors in dual 2D MEMS mirror scanning system

Fig. 10. Schematic of dual 2D MEMS mirror scanning confocal microscopy system

Fig. 11. 2D MEMS mirror Characterization. (a) Small signal frequency response plots; (b) the response of mirror tilt angle versus applied voltages

Fig. 12. System detector response near focal plane

Fig. 13. Step sample imaging. (a) The rendered 3D surface profile; (b) the cross-sectional profile