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Acta Optica Sinica, Volume. 43, Issue 21, 2111001(2023)

Aberration-Free Dual 2D MEMS Mirror Scanning Method for Optical Microscopy

Guozhuo Zhang, Xu Wang, Yun Wang, Weiqian Zhao, Lirong Qiu, and Han Cui*
Author Affiliations
  • MIIT Key Laboratory of Complex-Field Intelligent Exploration, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
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    Article index updated: Mar. 10, 2025

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    Guozhuo Zhang, Xu Wang, Yun Wang, Weiqian Zhao, Lirong Qiu, Han Cui. Aberration-Free Dual 2D MEMS Mirror Scanning Method for Optical Microscopy[J]. Acta Optica Sinica, 2023, 43(21): 2111001

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    Paper Information

    Category: Imaging Systems

    Received: May. 15, 2023

    Accepted: Jun. 5, 2023

    Published Online: Nov. 8, 2023

    The Author Email: Cui Han (han.cui@bit.edu.cn)

    DOI:10.3788/AOS230984

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology