Acta Optica Sinica, Volume. 42, Issue 7, 0734001(2022)
Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror
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Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001
Category: X-Ray Optics
Received: Aug. 11, 2021
Accepted: Oct. 15, 2021
Published Online: Mar. 28, 2022
The Author Email: Xue Song (xuesong@zjlab.org.cn)