Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li; Nan Wang; Wanqian Zhu; Zhongmin Xu; Limin Jin; Xiaohao Dong; Song Xue

doi:10.3788/AOS202242.0734001

Acta Optica Sinica, Volume. 42, Issue 7, 0734001(2022)

Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li^1,2, Nan Wang^1,3, Wanqian Zhu^1,3, Zhongmin Xu^1,3, Limin Jin^1,3, Xiaohao Dong^1,3, and Song Xue^1,3、*

Author Affiliations

¹Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Shanghai 100049, China

³Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

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Figures & Tables(13)

Fig. 1. Structure diagram of PBM

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Fig. 2. Unit voltage profile of 600 mm long mirror under 18 groups of PZT

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Fig. 3. Simplified 3D model diagram

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Fig. 4. Diagram of model meshing

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Fig. 5. Comparison of simulated surface before and after self-gravity correction

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Fig. 6. Comparison of target surface shape and simulation surface shape

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Fig. 7. Actual deviation between target surface shape and simulation surface shape

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Fig. 8. Thermal load and temperature distribution diagram

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Fig. 9. Surface view of mirror before and after thermal deformation correction

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Table 1. Material parameters of PZT-5H
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Table 1. Material parameters of PZT-5H
Density /(kg·m^-3) Stiffness constant /(10^-10 Pa) Piezoelectricconstant /(C·m^-2) Dielectricconstant
c₁₁ c₁₂ c₁₃ c₃₃ c₄₄ c₆₆ e₃₁ e₃₃ e₁₅ ε₁₁ ε₃₃
7500 12.70 8.02 8.46 11.74 2.29 2.35 -6.60 23.24 17.03 1704.40 1433.60

Table 2. Material properties of simulation analysis
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Table 2. Material properties of simulation analysis
Material Poisson ratio Young’smodulus /GPa Density /(kg·m^-3)
Si 0.3 169 2330
Structural steel 0.3 200 7850

Table 3. Comparison of parameters before and after gravity correction
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Table 3. Comparison of parameters before and after gravity correction
Parameter PV /nm RMS /nrad
Before correction 37.160 242.430
After correction 0.224 7.743
Correction efficiency /% 99.39 96.81

Table 4. Comparison of parameters before and after thermal mutation compensation
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Table 4. Comparison of parameters before and after thermal mutation compensation
Parameter PV /μm RMS /μrad
Before correction 0.7760 3.7157
After correction 0.0320 0.6820
Correction efficiency /% 95.88 81.65

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Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001

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