Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li; Nan Wang; Wanqian Zhu; Zhongmin Xu; Limin Jin; Xiaohao Dong; Song Xue

doi:10.3788/AOS202242.0734001

Acta Optica Sinica, Volume. 42, Issue 7, 0734001(2022)

Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror

Tong Li^1,2, Nan Wang^1,3, Wanqian Zhu^1,3, Zhongmin Xu^1,3, Limin Jin^1,3, Xiaohao Dong^1,3, and Song Xue^1,3、*

Author Affiliations

¹Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Shanghai 100049, China

³Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

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Tong Li, Nan Wang, Wanqian Zhu, Zhongmin Xu, Limin Jin, Xiaohao Dong, Song Xue. Finite Element Analysis of Compensation of Surface Shape Accuracy of Piezoelectric Bimorph Mirror[J]. Acta Optica Sinica, 2022, 42(7): 0734001

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Paper Information

Category: X-Ray Optics

Received: Aug. 11, 2021

Accepted: Oct. 15, 2021

Published Online: Mar. 28, 2022

The Author Email: Xue Song (xuesong@zjlab.org.cn)

DOI:10.3788/AOS202242.0734001

Topics

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