Optical Element Surface Defect Measurement Based on Multispectral Technique

[1] International Organization for Standardization. Optics and photonics-preparation of drawings for optical elements and systems. Part 7: Surface imperfection tolerances: ISO 10110-7[S](2008).

[2] Surface defects of optical elements: GB/T 1185-2006[S], [S]. GB/T 1185-2006(2006).

[3] Bercegol H, Bouchut P R, Lamaignère L et al. The impact of laser damage on the lifetime of optical components in fusion lasers[C]. SPIE, 5273, 312-324(2004).

[4] Dai Mingkui, Xu Deyan. The present situation of imperfections testing and researching on the optical elements[J]. Optical Instruments, 18, 33-36(1996).

[5] Baker L R. Microscope image comparator[J]. Journal of Modern Optics, 31, 611-614(1984).

[6] Baker L R. Inspection of surface flaws by comparator microscopy[J]. Applied Optics, 27, 4620-4625(1988). http://europepmc.org/abstract/MED/20539625

[7] Baker L R. On-machine measurement of roughness, waviness, and flaws[C]. SPIE, 1333, 248-256(1990).

[8] Liberati F. Measure of surface and bulk defects in any transmitting or reflecting optical component[C]. SPIE, 1781, 170-174(1993).

[9] Buchtel M E. A virtual image superposing comparator[C]. SPIE, 1821, 130-151(1993).

[10] Yang Yongying, Lu Chunhua, Liang Jiao et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface[J]. Acta Optica Sinica, 27, 1031-1038(2007).

[11] Liu D, Wang S, Cao P et al. Dark-field microscopic image stitching method for surface defects evaluation of large fine optics[J]. Optics Express, 21, 5974-5987(2013). http://www.ncbi.nlm.nih.gov/pubmed/23482166

[12] Zhang Xiao, Yang Guoguang, Cheng Shangyi et al. Laser frequency spectrum analysis method and automatic inspection instrument of optical surface imperfection[J]. Chinese Journal of Scientific Instrument, 15, 396-399(1994).

[14] Taubin G. Estimation of planar curves, surfaces, and nonplanar space curves defined by implicit equations with applications to edge and range image segmentation[J]. IEEE Transactions on Pattern Analysis & Machine Intelligence, 13, 1115-1138(1991). http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=103273

[15] Canny J[J]. A computational approach to edge detection IEEE Transactions on Pattern Analysis and Machine Intelligence, 1986, 679-698.

[16] Hough PV C. Method. -12-18[P]. means for recognizing complex patterns: US3069654A.(1962).

CLP Journals

[1] WANG Guilin, ZHU Junhui, LI Jiaxiang, LI Zhibin. In situ detection and evaluation of surface defects for large-aperture optical elements[J]. Journal of Applied Optics, 2019, 40(6): 1167

[2] Ma Yun, Chen Lei, Zhu Wenhua, Liu Yiming, Li Jianxin. Dynamic Twyman Interferometer for Phase Defect Measurement[J]. Chinese Journal of Lasers, 2017, 44(12): 1204009

[3] Wang Huadong, Zhang Taihua. Research Progresses on Characterization and Detection Technology of Subsurface Damages in Optical Materials[J]. Laser & Optoelectronics Progress, 2017, 54(10): 100003

[4] WANG Zheng-zhou, DUAN Ya-xuan, WANG Li, TAN Meng, LI Hong-guang, WEI Ji-tong. Detecting optical component damage based on neighborhood vector dot contrast image enhancement[J]. Optics and Precision Engineering, 2019, 27(12): 2668

Tools

Get Citation

Copy Citation Text

Luo Mao, Bu Yang, Xu Jinghao, Wang Xiangzhao. Optical Element Surface Defect Measurement Based on Multispectral Technique[J]. Chinese Journal of Lasers, 2017, 44(1): 104001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: measurement and metrology

Received: Sep. 1, 2016

Accepted: --

Published Online: Jan. 10, 2017

The Author Email: Mao Luo (zju_oeelm@zju.edu.cn)

DOI:10.3788/CJL201744.0104001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology