Chinese Journal of Lasers, Volume. 44, Issue 1, 104001(2017)

Optical Element Surface Defect Measurement Based on Multispectral Technique

Luo Mao1,2、*, Bu Yang2, Xu Jinghao2, and Wang Xiangzhao2
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    Luo Mao, Bu Yang, Xu Jinghao, Wang Xiangzhao. Optical Element Surface Defect Measurement Based on Multispectral Technique[J]. Chinese Journal of Lasers, 2017, 44(1): 104001

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 1, 2016

    Accepted: --

    Published Online: Jan. 10, 2017

    The Author Email: Mao Luo (zju_oeelm@zju.edu.cn)

    DOI:10.3788/CJL201744.0104001

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