Fig. 1. Schematic of measurement system

Fig. 2. Defect images with different wavelengths and filter positions. (a) Wavelength is 436 nm and filter is in the imaging path in front of CCD; (b) wavelength is 436 nm and filter is in the illuminating path; (c) wavelength is 486 nm and filter is in the imaging path in front of CCD; (d) wavelength is 486 nm and filter is in the illuminating path

Fig. 3. Statistical area for defect number

Fig. 4. Defect images with different incidence wavelengths. (a) λ=365 nm; (b) λ=405 nm; (c) λ=436 nm; (d) λ=486 nm; (e) λ=550 nm; (f) white light

Fig. 5. Image fused with defect images measured at 365 nm and 405 nm wavelengths

Fig. 6. 5 μm-diameter pinhole in Thorlabs test target

Fig. 7. Images of 5 μm-diameter pinhole with different incidence wavelengths. (a) λ=365 nm; (b) λ=405 nm; (c) λ=436 nm; (d) λ=486 nm; (e) λ=550 nm; (f) white light

Fig. 8. Measured result of 5 μm-diameter pinhole at wavelength of 365 nm

Fig. 9. Laser holes with Da=4.950 μm

Fig. 10. Measured results of laser holes

Fig. 11. 50 lp/mm line pair image in Thorlabs test target

Fig. 12. 50 lp/mm line pair images with different incidence wavelengths. (a) λ=365 nm; (b) λ=405 nm; (c) λ=436 nm; (d) λ=486 nm; (e) λ=550 nm; (f) white light

Fig. 13. Measured result of 50 lp/mm line pair at wavelength of 365 nm