[1] [1] W. H. Arnold. Towards 3 nm overlay and critical dimension uniformity: an integrated error budget for double patterning lithography［C］. SPIE, 2008, 6924: 692404

[2] [2] H. Ganser, M. Darscht, Y. Miklyaev et al.. High-throughput homogenizers for hyper-NA illumination systems［C］. SPIE, 2006, 6154: 61542N

[3] [3] T. Bizjak, T. Mitra, D. Hauschild et al.. Novel refractive optics enable multipole off-axis illumination［C］. SPIE, 2008, 6924: 69242J

[4] [4] S. Moller, S. R. Forrest. Improved light out-coming in organic light emitting diodes employing ordered micro-lens arrays［J］. J. Appl. Phys, 2002, 91(5): 3324～3327

[5] [5] T. Bizjak, T. Mitra, L. Aschke. Novel high throughput micro-optical beam shapers reduce the complexity of macrooptics in Fabrication hyper-NA illumination system［C］. SPIE, 2007, 6520: 65202X

[6] [6] M. C. Hutley. Optical techniques for the generation of microlens arrays［J］. J. Mod. Opt., 1990, 37(2): 253～265

[7] [7] He Miao, Yi Xinjian, Cheng Zuhai. Fabrication of Si concave microlens array［J］. J. Infrared Millimeter Waves, 2002, 21(1): 33～36

[8] [8] Zhang Xinyu, Yi Xinjian, Zhao Xingrong. Study of fabricating linear quartz microlens array［J］. Acta Photonica Sinica, 1997, 26(8): 710～714

[9] [9] A. Schilling, R. Merz, C. Ossman et al.. Surface profiles of reflow microlenses under the influence of surface tension and gravity［J］. Opt. Eng., 2000, 39(8): 2171～2176

[10] [10] M. E. Matamedi, M. P. Griswold, R. E. Knowlden. Silicon microlenses for enhanced optical coupling to silicon focal planets［C］. SPIE, 1991, 1544: 22～32

[11] [11] J. Fruendt, M. Jarczynski, T. Mitra. Simultaneous multiple uniform spot generation with micro optics［C］. SPIE, 2008, 7062: 70620S

[12] [12] O. Homburg, D. Hauschild, P. Harten et al.. Refractive beam shaping: from Maxwell′s equations to products and applications in laser materials processing［C］. SPIE, 2007, 6663: 66630D

[13] [13] B. G. Crowther, D. G. Koch, J. M. Kunick et al.. A fly′s eye condenser system for uniform illumination［C］. SPIE, 2002. 4832

[14] [14] Zhou Shuwen, Lin Jinbo. Uniformity of the illumination system with fly′s eye lens［J］. J. Zhejiang University, 1986, 20(5): 130～136

[15] [15] Wang Wei, Zhou Changhe. New technology for fabrication of polymer microlens arrays［J］. Chinese J. Lasers, 2009, 36(11): 2869～2872