Chinese Journal of Lasers, Volume. 40, Issue 2, 216001(2013)
Design of Micro-Cylindrical-Lens Array Used for Illumination Uniformization in Lithography Systems
Uniform illumination is an important condition for maintaining high uniformization consistence of lithography lines in projection lithography. Micro-lens array used as the illumination uniformization component can make the rectangular illumination spot as well as acquire high far field uniformization. Based on modern processing technology, the cylindrical micro-lens array divided in two-dimension is designed, and the central bright line in the far field created by the transition area between the micro-lens array is eliminated. Simulation results show that the far field non-uniformi of the designed micro-lens array reaches 0.85%.
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Xiao Yanfen, Zhu Jing, Yang Baoxi, Hu Zhonghua, Zeng Aijun, Huang Huijie. Design of Micro-Cylindrical-Lens Array Used for Illumination Uniformization in Lithography Systems[J]. Chinese Journal of Lasers, 2013, 40(2): 216001
Category: Optical Design and Fabrication
Received: Aug. 7, 2012
Accepted: --
Published Online: Feb. 4, 2013
The Author Email: Yanfen Xiao (yanfenxiao2007@163.com)