Interface characterization of Mo/Si multilayers

Jiaoling Zhao; Hongbo He; Hu Wang; Kui Yi; Bin Wang; Yun Cui

doi:10.3788/COL201614.083401

Chinese Optics Letters, Volume. 14, Issue 8, 083401(2016)

Interface characterization of Mo/Si multilayers

Jiaoling Zhao^1,2, Hongbo He^1、*, Hu Wang^1,2, Kui Yi¹, Bin Wang^1,2, and Yun Cui¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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CLP Journals

[1] Hui Shi, Yu Zhang, Hongqing Wang, Weitao Liu, "Matrix formalism for radiating polarization sheets in multilayer structures of arbitrary composition," Chin. Opt. Lett. 15, 081901 (2017)

Cited By

[1] Yao Shan, Guohang Hu, Maria Luisa Grilli, Hongbo He, Meiping Zhu, Yuanan Zhao, Jianda Shao. Measuring ultrathin metal coatings using SPR spectroscopic ellipsometry with a prism-dielectric-metal-liquid configuration. Optics Express, 27, 7912(2019).

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Jiaoling Zhao, Hongbo He, Hu Wang, Kui Yi, Bin Wang, Yun Cui, "Interface characterization of Mo/Si multilayers," Chin. Opt. Lett. 14, 083401 (2016)

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Paper Information

Category: X-ray Optics

Received: Mar. 2, 2016

Accepted: May. 24, 2016

Published Online: Aug. 3, 2018

The Author Email: Hongbo He (hbhe@siom.ac.cn)

DOI:10.3788/COL201614.083401

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology