Chinese Journal of Lasers, Volume. 39, Issue 9, 906001(2012)
Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma
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Zhou Yujie, Feng Liqun, Sun Junqiang. Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma[J]. Chinese Journal of Lasers, 2012, 39(9): 906001
Paper Information
Category: materials and thin films
Received: Apr. 19, 2012
Accepted: --
Published Online: Jul. 17, 2012
The Author Email: Yujie Zhou (yujie.zhouhust@gmail.com)
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