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Chinese Journal of Lasers, Volume. 39, Issue 9, 906001(2012)

Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma

Zhou Yujie*, Feng Liqun, and Sun Junqiang
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    Article index updated: Mar. 10, 2025

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    Zhou Yujie, Feng Liqun, Sun Junqiang. Etching Characteristics of MgO Doped Lithium Niobate in Inductively Coupled Plasma[J]. Chinese Journal of Lasers, 2012, 39(9): 906001

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    Paper Information

    Category: materials and thin films

    Received: Apr. 19, 2012

    Accepted: --

    Published Online: Jul. 17, 2012

    The Author Email: Yujie Zhou (yujie.zhouhust@gmail.com)

    DOI:10.3788/cjl201239.0906001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology