Chinese Journal of Lasers, Volume. 47, Issue 7, 701027(2020)

Design and Realization of a Novel Poly-Silicon Light-Emitting Device Based on Standard CMOS Technology

Ai Kang1, Cheng Junji1, Zhu Kunfeng2, Wu Kejun1, Liu Zhongyuan3, Liu Zhiwei1, Zhao Jianming1, Huang Lei2, and Xu Kaikai1、*
Author Affiliations
  • 1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China
  • 2The 24th Research Institute of China Electronics Technology Group Corporation, Chongqing, Sichuan 400060, China
  • 3The 44th Research Institute of China Electronics Technology Group Corporation, Chongqing, Sichuan 400060, China
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    Presently, the manufacturing technology of silicon-based light sources that are compatible with complementary metal oxide semiconductor processes and have high luminous efficiency is immature. To address this problem, a new structure for a poly-silicon light-emitting device is proposed in this paper. The possible avalanche modes (interband transition, bremsstrahlung, intraband transition of holes between light and heavy mass bands, ionization under high-field conditions, and indirect interband reorganization) of the device under reverse bias voltage are studied. The mechanism is analyzed theoretically; moreover, the drift and diffusion of holes and electrons inside the device under reverse bias voltage are studied, which reveals that carrier injection increases the number of carriers involved in the avalanche multiplication process and can lead to an increase in the impact ionization rate. Furthermore, the electric field, spectrum, current, and light intensity of the device are analyzed. The quantum efficiency and photoelectric conversion efficiency are calculated; it is concluded that the impact ionization rate is improved by the carrier injection. The improvement in the device''s luminous efficiency is achieved by the improvement in the impact ionization rate, for which the quantum efficiency is 5.9×10 -5 and photoelectric conversion efficiency is 4.3×10 -6.

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    Ai Kang, Cheng Junji, Zhu Kunfeng, Wu Kejun, Liu Zhongyuan, Liu Zhiwei, Zhao Jianming, Huang Lei, Xu Kaikai. Design and Realization of a Novel Poly-Silicon Light-Emitting Device Based on Standard CMOS Technology[J]. Chinese Journal of Lasers, 2020, 47(7): 701027

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    Paper Information

    Special Issue:

    Received: Jan. 10, 2020

    Accepted: --

    Published Online: Jul. 10, 2020

    The Author Email: Xu Kaikai (kaikaix@uestc.edu)

    DOI:10.3788/CJL202047.0701027

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