Ultralow-Loss Silicon Nitride Integrated Photonics: Nonlinear Optics and Applications (Invited)

Huamin Zheng; Kunpeng Yu; Shichang Li; Ruiyang Chen; Jiaxuan Wang; Zhiyang Chen; Baoqi Shi; Zhongkai Wang; Yi-Han Luo; Jinbao Long; Wei Sun; Wei Liang; Chengying Bao; Hairun Guo; Junqiu Liu

doi:10.3788/AOS241178

Acta Optica Sinica, Volume. 44, Issue 15, 1513018(2024)

Ultralow-Loss Silicon Nitride Integrated Photonics: Nonlinear Optics and Applications (Invited)

Huamin Zheng¹, Kunpeng Yu^1,2, Shichang Li^1,3, Ruiyang Chen^1,3, Jiaxuan Wang^1,3, Zhiyang Chen^1,3, Baoqi Shi¹, Zhongkai Wang¹, Yi-Han Luo¹, Jinbao Long¹, Wei Sun¹, Wei Liang⁴, Chengying Bao⁵, Hairun Guo⁶, and Junqiu Liu^1,2、*

Author Affiliations

¹International Quantum Academy, Shenzhen 518048, Guangdong , China

²Hefei National Laboratory, Hefei 230088, Anhui , China

³Institute for Quantum Science and Engineering,Southern University of Science and Technology, Shenzhen 518055, Guangdong , China

⁴Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu , China

⁵Tsinghua University, Beijing 100084, China

⁶Shanghai University, Shanghai 200444, China

show less

Abstract Get PDF(in Chinese)

References(263)

[1] Cheng Q X, Bahadori M, Glick M et al. Recent advances in optical technologies for data centers: a review[J]. Optica, 5, 1354-1370(2018).

[2] Feldmann J, Youngblood N, Karpov M et al. Parallel convolutional processing using an integrated photonic tensor core[J]. Nature, 589, 52-58(2021).

[3] Yuan S, Wu Y K, Dang Z Z et al. Strongly enhanced second harmonic generation in a thin film lithium niobate heterostructure cavity[J]. Physical Review Letters, 127, 153901(2021).

[4] Yang S, Liu D C, Tan Z L et al. CMOS-compatible WS2-based all-optical modulator[J]. ACS Photonics, 5, 342-346(2018).

[5] Kippenberg T J, Spillane S M, Vahala K J. Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity[J]. Physical Review Letters, 93, 083904(2004).

[6] Del’Haye P, Schliesser A, Arcizet O et al. Optical frequency comb generation from a monolithic microresonator[J]. Nature, 450, 1214-1217(2007).

[7] Jang J K, Erkintalo M, Coen S et al. Temporal tweezing of light through the trapping and manipulation of temporal cavity solitons[J]. Nature Communications, 6, 7370(2015).

[8] Dudley J M, Genty G, Coen S. Supercontinuum generation in photonic crystal fiber[J]. Reviews of Modern Physics, 78, 1135-1184(2006).

[9] Riemensberger J, Kuznetsov N, Liu J Q et al. A photonic integrated continuous-travelling-wave parametric amplifier[J]. Nature, 612, 56-61(2022).

[10] Moss D J, Morandotti R, Gaeta A L et al. New CMOS-compatible platforms based on silicon nitride and Hydex for nonlinear optics[J]. Nature Photonics, 7, 597-607(2013).

[11] Gaeta A L, Lipson M, Kippenberg T J. Photonic-chip-based frequency combs[J]. Nature Photonics, 13, 158-169(2019).

[12] Ikeda K, Saperstein R E, Alic N et al. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides[J]. Optics Express, 16, 12987-12994(2008).

[13] Vamvakas V E, Vourdas N, Gardelis S. Optical characterization of Si-rich silicon nitride films prepared by low pressure chemical vapor deposition[J]. Microelectronics Reliability, 47, 794-797(2007).

[14] Krückel C J, Fülöp A, Klintberg T et al. Linear and nonlinear characterization of low-stress high-confinement silicon-rich nitride waveguides[J]. Optics Express, 23, 25827-25837(2015).

[15] Wu C L, Lin Y H, Su S P et al. Enhancing optical nonlinearity in a nonstoichiometric SiN waveguide for cross-wavelength all-optical data processing[J]. ACS Photonics, 2, 1141-1154(2015).

[16] Wang T, Ng D K T, Ng S K et al. Supercontinuum generation in bandgap engineered, back-end CMOS compatible silicon rich nitride waveguides[J]. Laser & Photonics Reviews, 9, 498-506(2015).

[17] Monro T M, Ebendorff-Heidepriem H. Progress in microstructured optical fibers[J]. Annual Review of Materials Research, 36, 467-495(2006).

[18] Lafforgue C, Guerber S, Ramirez J M et al. Broadband supercontinuum generation in nitrogen-rich silicon nitride waveguides using a 300 mm industrial platform[J]. Photonics Research, 8, 352-358(2020).

[19] Moille G, Westly D, Simelgor G et al. Impact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs[J]. Optics Letters, 46, 5970-5973(2021).

[20] Fu Y, Li J L, Cao C B. The superelastic mechanism of Si3N4 microsprings using micro-Raman spectroscopy[J]. Physical Chemistry Chemical Physics, 16, 14808-14812(2014).

[21] Karpov M, Guo H R, Kordts A et al. Raman self-frequency shift of dissipative Kerr solitons in an optical microresonator[J]. Physical Review Letters, 116, 103902(2016).

[22] Yi X, Yang Q F, Yang K Y et al. Theory and measurement of the soliton self-frequency shift and efficiency in optical microcavities[J]. Optics Letters, 41, 3419-3422(2016).

[23] Porcel M A G, Schepers F, Epping J P et al. Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths[J]. Optics Express, 25, 1542-1554(2017).

[24] Gyger F, Liu J Q, Yang F et al. Observation of stimulated Brillouin scattering in silicon nitride integrated waveguides[J]. Physical Review Letters, 124, 013902(2020).

[25] Dehghannasiri R, Eftekhar A A, Adibi A. Observation of stimulated Brillouin scattering in Si3N4 waveguides[C], 135-136(2017).

[26] Dehghannasiri R, Eftekhar A A, Adibi A. Raman-like stimulated Brillouin scattering in phononic-crystal-assisted silicon-nitride waveguides[J]. Physical Review A, 96, 053836(2017).

[27] Gundavarapu S, Brodnik G M, Puckett M et al. Sub-hertz fundamental linewidth photonic integrated Brillouin laser[J]. Nature Photonics, 13, 60-67(2019).

[28] Eggleton B J, Poulton C G, Pant R. Inducing and harnessing stimulated Brillouin scattering in photonic integrated circuits[J]. Advances in Optics and Photonics, 5, 536-587(2013).

[29] Poulton C G, Pant R, Eggleton B J. Acoustic confinement and stimulated Brillouin scattering in integrated optical waveguides[J]. Journal of the Optical Society of America B, 30, 2657-2664(2013).

[30] Eggleton B J, Poulton C G, Rakich P T et al. Brillouin integrated photonics[J]. Nature Photonics, 13, 664-677(2019).

[31] Chauhan N, Isichenko A, Liu K K et al. Visible light photonic integrated Brillouin laser[J]. Nature Communications, 12, 4685(2021).

[32] Botter R, Ye K X, Klaver Y et al. Guided-acoustic stimulated Brillouin scattering in silicon nitride photonic circuits[J]. Science Advances, 8, eabq2196(2022).

[33] Liu K K, Wang J W, Chauhan N et al. Integrated photonic molecule Brillouin laser with a high-power sub-100-mHz fundamental linewidth[J]. Optics Letters, 49, 45-48(2024).

[34] Levy J S, Foster M A, Gaeta A L et al. Harmonic generation in silicon nitride ring resonators[J]. Optics Express, 19, 11415-11421(2011).

[35] Lu X Y, Moille G, Rao A et al. Efficient photo-induced second harmonic generation in silicon nitride photonics[J]. Nature Photonics, 15, 131-136(2021).

[36] Nitiss E, Liu T Y, Grassani D et al. Formation rules and dynamics of photoinduced χ(2) gratings in silicon nitride waveguides[J]. ACS Photonics, 7, 147-153(2020).

[37] Hickstein D D, Carlson D R, Mundoor H et al. Self-organized nonlinear gratings for ultrafast nanophotonics[J]. Nature Photonics, 13, 494-499(2019).

[38] Billat A, Grassani D, Pfeiffer M H P et al. Large second harmonic generation enhancement in Si3N4 waveguides by all-optically induced quasi-phase-matching[J]. Nature Communications, 8, 1016(2017).

[39] Porcel M A G, Mak J, Taballione C et al. Photo-induced second-order nonlinearity in stoichiometric silicon nitride waveguides[J]. Optics Express, 25, 33143-33159(2017).

[40] Grassani D, Pfeiffer M H P, Kippenberg T J et al. Second- and third-order nonlinear wavelength conversion in an all-optically poled Si3N4 waveguide[J]. Optics Letters, 44, 106-109(2019).

[41] Lugiato L A, Lefever R. Spatial dissipative structures in passive optical systems[J]. Physical Review Letters, 58, 2209-2211(1987).

[42] Vahala K J. Optical microcavities[J]. Nature, 424, 839-846(2003).

[43] Kippenberg T J, Holzwarth R, Diddams S A. Microresonator-based optical frequency combs[J]. Science, 332, 555-559(2011).

[44] Levy J S, Gondarenko A, Foster M A et al. CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects[J]. Nature Photonics, 4, 37-40(2010).

[45] Herr T, Brasch V, Jost J D et al. Temporal solitons in optical microresonators[J]. Nature Photonics, 8, 145-152(2014).

[46] Yi X, Yang Q F, Yang K Y et al. Soliton frequency comb at microwave rates in a high-Q silica microresonator[J]. Optica, 2, 1078-1085(2015).

[47] Ye Z C, Jia H Y, Huang Z J et al. Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuits[J]. Photonics Research, 11, 558-568(2023).

[48] He Y, Yang Q F, Ling J W et al. Self-starting bi-chromatic LiNbO3 soliton microcomb[J]. Optica, 6, 1138-1144(2019).

[49] Gong Z, Liu X W, Xu Y T et al. Near-octave lithium niobate soliton microcomb[J]. Optica, 7, 1275-1278(2020).

[50] Yang K Y, Oh D Y, Lee S H et al. Bridging ultrahigh-Q devices and photonic circuits[J]. Nature Photonics, 12, 297-302(2018).

[51] Bao H L, Cooper A, Rowley M et al. Laser cavity-soliton microcombs[J]. Nature Photonics, 13, 384-389(2019).

[52] Wang X Y, Xie P, Wang W Q et al. Program-controlled single soliton microcomb source[J]. Photonics Research, 9, 66-72(2020).

[53] Liu X W, Gong Z, Bruch A W et al. Aluminum nitride nanophotonics for beyond-octave soliton microcomb generation and self-referencing[J]. Nature Communications, 12, 5428(2021).

[54] Liu J Q, Tian H, Lucas E et al. Monolithic piezoelectric control of soliton microcombs[J]. Nature, 583, 385-390(2020).

[55] Weng H Z, Liu J, Afridi A A et al. Directly accessing octave-spanning dissipative Kerr soliton frequency combs in an AlN microresonator[J]. Photonics Research, 9, 1351-1357(2021).

[56] Pu M H, Ottaviano L, Semenova E et al. Efficient frequency comb generation in AlGaAs-on-insulator[J]. Optica, 3, 823-826(2016).

[57] Moille G, Chang L, Xie W Q et al. Dissipative Kerr solitons in a III-V microresonator[J]. Laser & Photonics Reviews, 14, 2000022(2020).

[58] Jung H, Yu S P, Carlson D R et al. Tantala Kerr nonlinear integrated photonics[J]. Optica, 8, 811-817(2021).

[59] Guidry M A, Lukin D M, Yang K Y et al. Quantum optics of soliton microcombs[J]. Nature Photonics, 16, 52-58(2022).

[60] Wang C L, Li J, Yi A L et al. Soliton formation and spectral translation into visible on CMOS-compatible 4H-silicon-carbide-on-insulator platform[J]. Light: Science & Applications, 11, 341(2022).

[61] Xia D, Yang Z L, Zeng P Y et al. Integrated chalcogenide photonics for microresonator soliton combs[J]. Laser & Photonics Reviews, 17, 2200219(2023).

[62] Nardi A, Davydova A, Kuznetsov N et al. Soliton microcomb generation in a III-V photonic crystal cavity[EB/OL]. http:∥arxiv.org/abs/2304.12968v2

[63] Dai J, Li X M, Liu A N et al. Low phase noise microwave signal generation based on soliton frequency comb in MgF2 microresonator[J]. Acta Optica Sinica, 42, 2007001(2022).

[64] Gondarenko A, Levy J S, Lipson M. High confinement micron-scale silicon nitride high Q ring resonator[J]. Optics Express, 17, 11366-11370(2009).

[65] Riemensberger J, Hartinger K, Herr T et al. Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition[J]. Optics Express, 20, 27661-27669(2012).

[66] Luke K, Dutt A, Poitras C B et al. Overcoming Si3N4 film stress limitations for high quality factor ring resonators[J]. Optics Express, 21, 22829-22833(2013).

[67] Brasch V, Geiselmann M, Herr T et al. Photonic chip-based optical frequency comb using soliton Cherenkov radiation[J]. Science, 351, 357-360(2016).

[68] Xuan Y, Liu Y, Varghese L T et al. High-Q silicon nitride microresonators exhibiting low-power frequency comb initiation[J]. Optica, 3, 1171-1180(2016).

[69] Pfeiffer M H P, Kordts A, Brasch V et al. Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics[J]. Optica, 3, 20-25(2016).

[70] Ji X C, Barbosa F A S, Roberts S P et al. Ultra-low-loss on-chip resonators with sub-milliwatt parametric oscillation threshold[J]. Optica, 4, 619-624(2017).

[71] Liu J Q, Raja A S, Karpov M et al. Ultralow-power chip-based soliton microcombs for photonic integration[J]. Optica, 5, 1347-1353(2018).

[72] Stern B, Ji X C, Okawachi Y et al. Battery-operated integrated frequency comb generator[J]. Nature, 562, 401-405(2018).

[73] Ye Z C, Fülöp A, Helgason Ó B et al. Low-loss high-Q silicon-rich silicon nitride microresonators for Kerr nonlinear optics[J]. Optics Letters, 44, 3326-3329(2019).

[74] Liu J Q, Lucas E, Raja A S et al. Photonic microwave generation in the X- and K-band using integrated soliton microcombs[J]. Nature Photonics, 14, 486-491(2020).

[75] Liu J Q, Huang G H, Wang R N et al. High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits[J]. Nature Communications, 12, 2236(2021).

[76] Ji X C, Jang J K, Dave U D et al. Exploiting ultralow loss multimode waveguides for broadband frequency combs[J]. Laser & Photonics Reviews, 15, 2000353(2021).

[77] Li Q, Briles T C, Westly D A et al. Stably accessing octave-spanning microresonator frequency combs in the soliton regime[J]. Optica, 4, 193-203(2017).

[78] Gao M D, Yang Q F, Ji Q X et al. Probing material absorption and optical nonlinearity of integrated photonic materials[J]. Nature Communications, 13, 3323(2022).

[79] Brasch V, Geiselmann M, Pfeiffer M H P et al. Bringing short-lived dissipative Kerr soliton states in microresonators into a steady state[J]. Optics Express, 24, 29312-29320(2016).

[80] Yi X, Yang Q F, Yang K Y et al. Active capture and stabilization of temporal solitons in microresonators[J]. Optics Letters, 41, 2037-2040(2016).

[81] Wildi T, Brasch V, Liu J Q et al. Thermally stable access to microresonator solitons via slow pump modulation[J]. Optics Letters, 44, 4447-4450(2019).

[82] Nishimoto K, Minoshima K, Yasui T et al. Thermal control of a Kerr microresonator soliton comb via an optical sideband[J]. Optics Letters, 47, 281-284(2022).

[83] Cole D C, Stone J R, Erkintalo M et al. Kerr-microresonator solitons from a chirped background[J]. Optica, 5, 1304-1310(2018).

[84] Miao R L, Zhang C X, Zheng X et al. Repetition rate locked single-soliton microcomb generation via rapid frequency sweep and sideband thermal compensation[J]. Photonics Research, 10, 1859-1867(2022).

[85] Zheng H M, Sun W, Ding X X et al. Programmable access to microresonator solitons with modulational sideband heating[J]. APL Photonics, 8, 126110(2023).

[86] Stone J R, Briles T C, Drake T E et al. Thermal and nonlinear dissipative-soliton dynamics in Kerr-microresonator frequency combs[J]. Physical Review Letters, 121, 063902(2018).

[87] Obrzud E, Lecomte S, Herr T. Temporal solitons in microresonators driven by optical pulses[J]. Nature Photonics, 11, 600-607(2017).

[88] Lei F C, Ye Z C, Torres-Company V. Thermal noise reduction in soliton microcombs via laser self-cooling[J]. Optics Letters, 47, 513-516(2022).

[89] Grassani D, El Dirani H, Sabattoli F A et al. Extending thermal stability of short-living soliton states in silicon nitride microring resonators[J]. Optics Continuum, 1, 1516-1528(2022).

[90] Shen B Q, Chang L, Liu J Q et al. Integrated turnkey soliton microcombs[J]. Nature, 582, 365-369(2020).

[91] Voloshin A S, Kondratiev N M, Lihachev G V et al. Dynamics of soliton self-injection locking in optical microresonators[J]. Nature Communications, 12, 235(2021).

[92] Guo H, Karpov M, Lucas E et al. Universal dynamics and deterministic switching of dissipative Kerr solitons in optical microresonators[J]. Nature Physics, 13, 94-102(2017).

[93] Xue X X, Xuan Y, Liu Y et al. Mode-locked dark pulse Kerr combs in normal-dispersion microresonators[J]. Nature Photonics, 9, 594-600(2015).

[94] Xue X X, Wang P H, Xuan Y et al. Microresonator Kerr frequency combs with high conversion efficiency[J]. Laser & Photonics Reviews, 11, 1600276(2017).

[95] Huang S W, Zhou H, Yang J et al. Mode-locked ultrashort pulse generation from on-chip normal dispersion microresonators[J]. Physical Review Letters, 114, 053901(2015).

[96] Nazemosadat E, Fülöp A, Helgason Ó B et al. Switching dynamics of dark-pulse Kerr frequency comb states in optical microresonators[J]. Physical Review A, 103, 013513(2021).

[97] Parra-Rivas P, Gomila D, Knobloch E et al. Origin and stability of dark pulse Kerr combs in normal dispersion resonators[J]. Optics Letters, 41, 2402-2405(2016).

[98] Anderson M H, Weng W L, Lihachev G et al. Zero dispersion Kerr solitons in optical microresonators[J]. Nature Communications, 13, 4764(2022).

[99] Lobanov V E, Lihachev G, Kippenberg T J et al. Frequency combs and platicons in optical microresonators with normal GVD[J]. Optics Express, 23, 7713-7721(2015).

[100] Lihachev G, Weng W L, Liu J Q et al. Platicon microcomb generation using laser self-injection locking[J]. Nature Communications, 13, 1771(2022).

[101] Liu H, Huang S W, Wang W T et al. Stimulated generation of deterministic platicon frequency microcombs[J]. Photonics Research, 10, 1877-1885(2022).

[102] Rebolledo-Salgado I, Quevedo-Galán C, Helgason Ó B et al. Platicon dynamics in photonic molecules[J]. Communications Physics, 6, 303(2023).

[103] Lihachev G, Riemensberger J, Weng W L et al. Low-noise frequency-agile photonic integrated lasers for coherent ranging[J]. Nature Communications, 13, 3522(2022).

[104] Jin W, Yang Q F, Chang L et al. Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators[J]. Nature Photonics, 15, 346-353(2021).

[105] Sun W, Chen Z Y, Li L Z et al. A chip-integrated comb-based microwave oscillator[EB/OL]. http:∥arxiv.org/abs/2403.02828v1

[106] Fülöp A, Mazur M, Lorences-Riesgo A et al. High-order coherent communications using mode-locked dark-pulse Kerr combs from microresonators[J]. Nature Communications, 9, 1598(2018).

[107] Alshaykh M S, Xuan Y, Leaird D E et al. Kerr combs for stimulated Brillouin scattering mitigation in long-haul analog optical links[J]. Journal of Lightwave Technology, 37, 5773-5779(2019).

[108] Amin A A, Islam M S, Paul S et al. Performance analysis of soliton and Gaussian pulse in long haul communication[C], 447-451(2015).

[109] Moille G, Li Q, Briles T C et al. Broadband resonator-waveguide coupling for efficient extraction of octave-spanning microcombs[J]. Optics Letters, 44, 4737-4740(2019).

[110] Lu X Y, Moille G, Li Q et al. Efficient telecom-to-visible spectral translation through ultralow power nonlinear nanophotonics[J]. Nature Photonics, 13, 593-601(2019).

[111] Foster M A, Turner A C, Sharping J E et al. Broad-band optical parametric gain on a silicon photonic chip[J]. Nature, 441, 960-963(2006).

[112] Lamont M R E, Luther-Davies B, Choi D Y et al. Supercontinuum generation in dispersion engineered highly nonlinear (γ=10/W/m) As2S3) chalcogenide planar waveguide[J]. Optics Express, 16, 14938-14944(2008).

[113] Pu M H, Hu H, Ottaviano L et al. Ultra-efficient and broadband nonlinear AlGaAs-on-insulator chip for low-power optical signal processing[J]. Laser & Photonics Reviews, 12, 1800111(2018).

[114] Ye Z C, Zhao P, Twayana K et al. Overcoming the quantum limit of optical amplification in monolithic waveguides[J]. Science Advances, 7, eabi8150(2021).

[115] Alfano R R, Shapiro S L. Emission in the region 4000 to 7000 Å via four-photon coupling in glass[J]. Physical Review Letters, 24, 584-587(1970).

[116] Lin C, Stolen R H. New nanosecond continuum for excited-state spectroscopy[J]. Applied Physics Letters, 28, 216-218(1976).

[117] Knight J C, Birks T A, Russell P S et al. All-silica single-mode optical fiber with photonic crystal cladding[J]. Optics Letters, 21, 1547-1549(1996).

[118] Russell P. Photonic crystal fibers[J]. Science, 299, 358-362(2003).

[119] Ranka J K, Windeler R S, Stentz A J. Visible continuum generation in air-silica microstructure optical fibers with anomalous dispersion at 800 nm[J]. Optics Letters, 25, 25-27(2000).

[120] Zhao H L, Kuyken B, Clemmen S et al. Visible-to-near-infrared octave spanning supercontinuum generation in a silicon nitride waveguide[J]. Optics Letters, 40, 2177-2180(2015).

[121] Halir R, Okawachi Y, Levy J S et al. Ultrabroadband supercontinuum generation in a CMOS-compatible platform[J]. Optics Letters, 37, 1685-1687(2012).

[122] Epping J P, Hoekman M, Mateman R et al. High confinement, high yield Si3N4 waveguides for nonlinear optical applications[J]. Optics Express, 23, 642-648(2015).

[123] Johnson A R, Mayer A S, Klenner A et al. Octave-spanning coherent supercontinuum generation in a silicon nitride waveguide[J]. Optics Letters, 40, 5117-5120(2015).

[124] Mayer A S, Klenner A, Johnson A R et al. Frequency comb offset detection using supercontinuum generation in silicon nitride waveguides[J]. Optics Express, 23, 15440-15451(2015).

[125] Ji X C, Mojahed D, Okawachi Y et al. Millimeter-scale chip-based supercontinuum generation for optical coherence tomography[J]. Science Advances, 7, eabg8869(2021).

[126] Carlson D R, Hickstein D D, Lind A et al. Photonic-chip supercontinuum with tailored spectra for counting optical frequencies[J]. Physical Review Applied, 8, 014027(2017).

[127] Carlson D R, Hickstein D D, Lind A et al. Self-referenced frequency combs using high-efficiency silicon-nitride waveguides[J]. Optics Letters, 42, 2314-2317(2017).

[128] Guo H R, Herkommer C, Billat A et al. Mid-infrared frequency comb via coherent dispersive wave generation in silicon nitride nanophotonic waveguides[J]. Nature Photonics, 12, 330-335(2018).

[129] Grassani D, Tagkoudi E, Guo H R et al. Mid infrared gas spectroscopy using efficient fiber laser driven photonic chip-based supercontinuum[J]. Nature Communications, 10, 1553(2019).

[130] Klenner A, Mayer A S, Johnson A R et al. Gigahertz frequency comb offset stabilization based on supercontinuum generation in silicon nitride waveguides[J]. Optics Express, 24, 11043-11053(2016).

[131] Ishizawa A, Kawashima K, Kou R et al. Direct f-3f self-referencing using an integrated silicon-nitride waveguide[J]. Optics Express, 30, 5265-5273(2022).

[132] Guo H R, Weng W L, Liu J Q et al. Nanophotonic supercontinuum based mid-infrared dual-comb spectroscopy[J]. Optica, 7, 1181-1188(2020).

[133] Ren K X, Guo Y S, Zhai Y K et al. On-chip octave-spanning flat supercontinuum in all-normal-dispersion silicon nitride waveguides[J]. Optics Express, 32, 8527-8536(2024).

[134] Rebolledo-Salgado I, Ye Z C, Christensen S et al. Coherent supercontinuum generation in all-normal dispersion Si3N4 waveguides[J]. Optics Express, 30, 8641-8651(2022).

[135] Anderson M H, Bouchand R, Liu J Q et al. Photonic chip-based resonant supercontinuum via pulse-driven Kerr microresonator solitons[J]. Optica, 8, 771-779(2021).

[136] Wu R, Torres-Company V, Leaird D E et al. Supercontinuum-based 10-GHz flat-topped optical frequency comb generation[J]. Optics Express, 21, 6045-6052(2013).

[137] Beha K, Cole D C, Del’Haye P et al. Electronic synthesis of light[J]. Optica, 4, 406-411(2017).

[138] Davenport M L, Liu S T, Bowers J E. Integrated heterogeneous silicon/III-V mode-locked lasers[J]. Photonics Research, 6, 468-478(2018).

[139] van Gasse K, Uvin S, Moskalenko V et al. Recent advances in the photonic integration of mode-locked laser diodes[J]. IEEE Photonics Technology Letters, 31, 1870-1873(2019).

[140] Zhang Y N, Wu J Y, Jia L N et al. Graphene oxide for nonlinear integrated photonics[J]. Laser & Photonics Reviews, 17, 2200512(2023).

[141] Zhang Y N, Wu J Y, Yang Y Y et al. Enhanced supercontinuum generation in integrated waveguides incorporated with graphene oxide films[J]. Advanced Materials Technologies, 8, 2201796(2023).

[142] Mbonde H M, Singh N, Frare B L S et al. Octave-spanning supercontinuum generation in a CMOS-compatible thin Si3N4 waveguide coated with highly nonlinear TeO2[J]. Optics Letters, 49, 2725-2728(2024).

[143] Kou R, Ishizawa A, Yoshida K et al. Spatially resolved multimode excitation for smooth supercontinuum generation in a SiN waveguide[J]. Optics Express, 31, 6088-6098(2023).

[144] Kondratiev N M, Lobanov V E, Cherenkov A V et al. Self-injection locking of a laser diode to a high-Q WGM microresonator[J]. Optics Express, 25, 28167-28178(2017).

[145] Kondratiev N M, Lobanov V E, Shitikov A E et al. Recent advances in laser self-injection locking to high-Q microresonators[J]. Frontiers of Physics, 18, 21305(2023).

[146] Liang W, Ilchenko V S, Eliyahu D et al. Ultralow noise miniature external cavity semiconductor laser[J]. Nature Communications, 6, 7371(2015).

[147] Liang W, Eliyahu D, Ilchenko V S et al. High spectral purity Kerr frequency comb radio frequency photonic oscillator[J]. Nature Communications, 6, 7957(2015).

[148] Pavlov N G, Koptyaev S, Lihachev G V et al. Narrow-linewidth lasing and soliton Kerr microcombs with ordinary laser diodes[J]. Nature Photonics, 12, 694-698(2018).

[149] Stern B, Ji X C, Dutt A et al. Compact narrow-linewidth integrated laser based on a low-loss silicon nitride ring resonator[J]. Optics Letters, 42, 4541-4544(2017).

[150] Fan Y W, van Rees A, van der Slot P J M et al. Hybrid integrated InP-Si3N4 diode laser with a 40-Hz intrinsic linewidth[J]. Optics Express, 28, 21713-21728(2020).

[151] Su Q S, Wei F, Chen C et al. Tunable self-injection locking light source on narrow linewidth chip[J]. Chinese Journal of Lasers, 50, 0216002(2023).

[152] Raja A S, Voloshin A S, Guo H R et al. Electrically pumped photonic integrated soliton microcomb[J]. Nature Communications, 10, 680(2019).

[153] Xiang C, Liu J Q, Guo J et al. Laser soliton microcombs heterogeneously integrated on silicon[J]. Science, 373, 99-103(2021).

[154] Huang G H, Lucas E, Liu J Q et al. Thermorefractive noise in silicon-nitride microresonators[J]. Physical Review A, 99, 061801(2019).

[155] Li B H, Jin W, Wu L et al. Reaching fiber-laser coherence in integrated photonics[J]. Optics Letters, 46, 5201-5204(2021).

[156] Guo J, McLemore C A, Xiang C et al. Chip-based laser with 1-hertz integrated linewidth[J]. Science Advances, 8, eabp9006(2022).

[157] Fiorentino M, Voss P L, Sharping J E et al. All-fiber photon-pair source for quantum communications[J]. IEEE Photonics Technology Letters, 14, 983-985(2002).

[158] Helt L G, Yang Z S, Liscidini M et al. Spontaneous four-wave mixing in microring resonators[J]. Optics Letters, 35, 3006-3008(2010).

[159] Guo K, Shi X D, Wang X L et al. Generation rate scaling: the quality factor optimization of microring resonators for photon-pair sources[J]. Photonics Research, 6, 587-596(2018).

[160] Vernon Z, Liscidini M, Sipe J E. No free lunch: the trade-off between heralding rate and efficiency in microresonator-based heralded single photon sources[J]. Optics Letters, 41, 788-791(2016).

[161] Pfeiffer M H P, Liu J Q, Geiselmann M et al. Coupling ideality of integrated planar high-Q microresonators[J]. Physical Review Applied, 7, 024026(2017).

[162] Grudinin I S, Matsko A B, Maleki L. Brillouin lasing with a CaF2 whispering gallery mode resonator[J]. Physical Review Letters, 102, 043902(2009).

[163] Marpaung D, Yao J P, Capmany J. Integrated microwave photonics[J]. Nature Photonics, 13, 80-90(2019).

[164] Marpaung D, Morrison B, Pagani M et al. Low-power, chip-based stimulated Brillouin scattering microwave photonic filter with ultrahigh selectivity[J]. Optica, 2, 76-83(2015).

[165] Li J, Lee H, Vahala K J. Microwave synthesizer using an on-chip Brillouin oscillator[J]. Nature Communications, 4, 2097(2013).

[166] Gertler S, Kittlaus E A, Otterstrom N T et al. Tunable microwave-photonic filtering with high out-of-band rejection in silicon[J]. APL Photonics, 5, 096103(2020).

[167] Otterstrom N T, Kittlaus E A, Gertler S et al. Resonantly enhanced nonreciprocal silicon Brillouin amplifier[J]. Optica, 6, 1117-1123(2019).

[168] Li J, Suh M G, Vahala K. Microresonator brillouin gyroscope[J]. Optica, 4, 346-348(2017).

[169] Lai Y H, Suh M G, Lu Y K et al. Earth rotation measured by a chip-scale ring laser gyroscope[J]. Nature Photonics, 14, 345-349(2020).

[170] Bashan G, Diamandi H H, London Y et al. Optomechanical time-domain reflectometry[J]. Nature Communications, 9, 2991(2018).

[171] Kittlaus E A, Otterstrom N T, Kharel P et al. Non-reciprocal interband Brillouin modulation[J]. Nature Photonics, 12, 613-619(2018).

[172] Kittlaus E A, Jones W M, Rakich P T et al. Electrically driven acousto-optics and broadband non-reciprocity in silicon photonics[J]. Nature Photonics, 15, 43-52(2021).

[173] Sohn D B, Kim S, Bahl G. Time-reversal symmetry breaking with acoustic pumping of nanophotonic circuits[J]. Nature Photonics, 12, 91-97(2018).

[174] Kim J H, Kuzyk M C, Han K W et al. Non-reciprocal Brillouin scattering induced transparency[J]. Nature Physics, 11, 275-280(2015).

[175] Obrzud E, Rainer M, Harutyunyan A et al. A microphotonic astrocomb[J]. Nature Photonics, 13, 31-35(2019).

[176] Yang Q F, Shen B Q, Wang H M et al. Vernier spectrometer using counterpropagating soliton microcombs[J]. Science, 363, 965-968(2019).

[177] Marin-Palomo P, Kemal J N, Karpov M et al. Microresonator-based solitons for massively parallel coherent optical communications[J]. Nature, 546, 274-279(2017).

[178] Newman Z L, Maurice V, Drake T et al. Architecture for the photonic integration of an optical atomic clock[J]. Optica, 6, 680-685(2019).

[179] Riemensberger J, Lukashchuk A, Karpov M et al. Massively parallel coherent laser ranging using a soliton microcomb[J]. Nature, 581, 164-170(2020).

[180] Marchand P J, Riemensberger J, Skehan J C et al. Soliton microcomb based spectral domain optical coherence tomography[J]. Nature Communications, 12, 427(2021).

[181] Mayor M, Queloz D. A Jupiter-mass companion to a solar-type star[J]. Nature, 378, 355-359(1995).

[182] Lovis C, Mayor M, Pepe F et al. An extrasolar planetary system with three Neptune-mass planets[J]. Nature, 441, 305-309(2006).

[183] Uzan J P. The fundamental constants and their variation: observational and theoretical status[J]. Reviews of Modern Physics, 75, 403-455(2003).

[184] Murphy M T, Udem T, Holzwarth R et al. High-precision wavelength calibration of astronomical spectrographs with laser frequency combs[J]. Monthly Notices of the Royal Astronomical Society, 380, 839-847(2007).

[185] Liske J, Grazian A, Vanzella E et al. Cosmic dynamics in the era of Extremely Large Telescopes[J]. Monthly Notices of the Royal Astronomical Society, 386, 1192-1218(2008).

[186] Chang G Q, Li C H, Phillips D F et al. Toward a broadband astro-comb: effects of nonlinear spectral broadening in optical fibers[J]. Optics Express, 18, 12736-12747(2010).

[187] Chang G Q, Li C H, Phillips D F et al. Optimization of filtering schemes for broadband astro-combs[J]. Optics Express, 20, 24987-25013(2012).

[188] Probst R A, Steinmetz T, Wilken T et al. Nonlinear amplification of side-modes in frequency combs[J]. Optics Express, 21, 11670-11687(2013).

[189] Metcalf A J, Bender C, Blakeslee S et al. Infrared astronomical spectroscopy for radial velocity measurements with 10 cm/s precision[C], JTh5A. 1(2018).

[190] Suh M G, Yi X, Lai Y H et al. Searching for exoplanets using a microresonator astrocomb[J]. Nature Photonics, 13, 25-30(2019).

[191] Suh M G, Yang Q F, Yang K Y et al. Microresonator soliton dual-comb spectroscopy[J]. Science, 354, 600-603(2016).

[192] Yang Q F, Yi X, Yang K Y et al. Counter-propagating solitons in microresonators[J]. Nature Photonics, 11, 560-564(2017).

[193] Joshi C, Klenner A, Okawachi Y et al. Counter-rotating cavity solitons in a silicon nitride microresonator[J]. Optics Letters, 43, 547-550(2018).

[194] Bao C Y, Yuan Z Q, Wu L et al. Architecture for microcomb-based GHz-mid-infrared dual-comb spectroscopy[J]. Nature Communications, 12, 6573(2021).

[195] Yu M J, Okawachi Y, Griffith A G et al. Silicon-chip-based mid-infrared dual-comb spectroscopy[J]. Nature Communications, 9, 1869(2018).

[196] Dutt A, Joshi C, Ji X C et al. On-chip dual-comb source for spectroscopy[J]. Science Advances, 4, e1701858(2018).

[197] Shams-Ansari A, Yu M J, Chen Z J et al. Thin-film lithium-niobate electro-optic platform for spectrally tailored dual-comb spectroscopy[J]. Communications Physics, 5, 88(2022).

[198] Pfeifle J, Brasch V, Lauermann M et al. Coherent terabit communications with microresonator Kerr frequency combs[J]. Nature Photonics, 8, 375-380(2014).

[199] Corcoran B, Tan M X, Xu X Y et al. Ultra-dense optical data transmission over standard fibre with a single chip source[J]. Nature Communications, 11, 2568(2020).

[200] Mazur M, Suh M G, Fülöp A et al. High spectral efficiency coherent superchannel transmission with soliton microcombs[J]. Journal of Lightwave Technology, 39, 4367-4373(2021).

[201] Geng Y, Zhou H, Han X J et al. Coherent optical communications using coherence-cloned Kerr soliton microcombs[J]. Nature Communications, 13, 1070(2022).

[202] Papp S B, Beha K, Del’Haye P et al. Microresonator frequency comb optical clock[J]. Optica, 1, 10-14(2014).

[203] Briles T C, Stone J R, Drake T E et al. Interlocking Kerr-microresonator frequency combs for microwave to optical synthesis[J]. Optics Letters, 43, 2933-2936(2018).

[204] Liew L A, Knappe S, Moreland J et al. Microfabricated alkali atom vapor cells[J]. Applied Physics Letters, 84, 2694-2696(2004).

[205] Knappe S, Gerginov V, Schwindt P D D et al. Atomic vapor cells for chip-scale atomic clocks with improved long-term frequency stability[J]. Optics Letters, 30, 2351-2353(2005).

[206] Kitching J. Chip-scale atomic devices[J]. Applied Physics Reviews, 5, 031302(2018).

[207] Shang H S, Pan D, Xie X P et al. Chip-scale active optical clock scheme[C](2020).

[208] Hummon M T, Kang S B, Bopp D G et al. Photonic chip for laser stabilization to an atomic vapor with 10-11 instability[J]. Optica, 5, 443-449(2018).

[209] Kim S, Westly D A, Roxworthy B J et al. Photonic waveguide to free-space Gaussian beam extreme mode converter[J]. Light: Science & Applications, 7, 72(2018).

[210] Chauhan N, Caron C, Wang J W et al. Trapped ion qubit and clock operations with a visible wavelength photonic coil resonator stabilized integrated Brillouin laser[EB/OL]. http:∥arxiv.org/abs/2402.16742v1

[211] Loh W, Reens D, Kharas D et al. Optical atomic clock interrogation via an integrated spiral cavity laser[EB/OL]. http:∥arxiv.org/abs/2403.12794v1

[212] Xu X Y, Tan M X, Corcoran B et al. 11 TOPS photonic convolutional accelerator for optical neural networks[J]. Nature, 589, 44-51(2021).

[213] Kim I, Martins R J, Jang J et al. Nanophotonics for light detection and ranging technology[J]. Nature Nanotechnology, 16, 508-524(2021).

[214] Trocha P, Karpov M, Ganin D et al. Ultrafast optical ranging using microresonator soliton frequency combs[J]. Science, 359, 887-891(2018).

[215] Suh M G, Vahala K J. Soliton microcomb range measurement[J]. Science, 359, 884-887(2018).

[216] Lukashchuk A, Riemensberger J, Karpov M et al. Dual chirped microcomb based parallel ranging at megapixel-line rates[J]. Nature Communications, 13, 3280(2022).

[217] Lukashchuk A, Riemensberger J, Tusnin A et al. Chaotic microcomb-based parallel ranging[J]. Nature Photonics, 17, 814-821(2023).

[218] Chen R X, Shu H W, Shen B T et al. Breaking the temporal and frequency congestion of LiDAR by parallel chaos[J]. Nature Photonics, 17, 306-314(2023).

[219] Snigirev V, Riedhauser A, Lihachev G et al. Ultrafast tunable lasers using lithium niobate integrated photonics[J]. Nature, 615, 411-417(2023).

[220] Huang D, Swanson E A, Lin C P et al. Optical coherence tomography[J]. Science, 254, 1178-1181(1991).

[221] Ji X C, Yao X W, Klenner A et al. Chip-based frequency comb sources for optical coherence tomography[J]. Optics Express, 27, 19896-19905(2019).

[222] Rank E A, Sentosa R, Harper D J et al. Toward optical coherence tomography on a chip: in vivo three-dimensional human retinal imaging using photonic integrated circuit-based arrayed waveguide gratings[J]. Light: Science & Applications, 10, 6(2021).

[223] Yi X, Yang Q F, Zhang X Y et al. Single-mode dispersive waves and soliton microcomb dynamics[J]. Nature Communications, 8, 14869(2017).

[224] Kudelin I, Groman W, Ji Q X et al. Photonic chip-based low-noise microwave oscillator[J]. Nature, 627, 534-539(2024).

[225] Sun S M, Wang B C, Liu K K et al. Integrated optical frequency division for microwave and mmWave generation[J]. Nature, 627, 540-545(2024).

[226] Zhao Y, Jang J K, Beals G J et al. All-optical frequency division on-chip using a single laser[J]. Nature, 627, 546-552(2024).

[227] He Y, Cheng L, Wang H M et al. Chip-scale high-performance photonic microwave oscillator[EB/OL]. http:∥arxiv.org/abs/2402.16229v1

[228] Jin X, Xie Z Y, Zhang X P et al. Microresonator-referenced soliton microcombs with zeptosecond-level timing noise[EB/OL]. http:∥arxiv.org/abs/2401.12760v1

[229] Jost J D, Hall J L, Ye J. Continuously tunable, precise, single frequency optical signal generator[J]. Optics Express, 10, 515-520(2002).

[230] Giorgetta F R, Coddington I, Baumann E et al. Fast high-resolution spectroscopy of dynamic continuous-wave laser sources[J]. Nature Photonics, 4, 853-857(2010).

[231] Spencer D T, Drake T, Briles T C et al. An optical-frequency synthesizer using integrated photonics[J]. Nature, 557, 81-85(2018).

[232] Ma C X, Wang X X, Anant V et al. Silicon photonic entangled photon-pair and heralded single photon generation with CAR>12, 000 and g(2)(0)<0.006[J]. Optics Express, 25, 32995-33006(2017).

[233] Gisin N, Thew R. Quantum communication[J]. Nature Photonics, 1, 165-171(2007).

[234] Yu Y, Ma F, Luo X Y et al. Entanglement of two quantum memories via fibres over dozens of kilometres[J]. Nature, 578, 240-245(2020).

[235] Liu J L, Luo X Y, Yu Y et al. Creation of memory-memory entanglement in a metropolitan quantum network[J]. Nature, 629, 579-585(2024).

[236] Wallucks A, Marinković I, Hensen B et al. A quantum memory at telecom wavelengths[J]. Nature Physics, 16, 772-777(2020).

[237] Forsch M, Stockill R, Wallucks A et al. Microwave-to-optics conversion using a mechanical oscillator in its quantum groundstate[J]. Nature Physics, 16, 69-74(2020).

[238] Ramelow S, Farsi A, Clemmen S et al. Silicon-nitride platform for narrowband entangled photon generation[EB/OL]. http:∥arxiv.org/abs/1508.04358v1

[239] Samara F, Martin A, Autebert C et al. High-rate photon pairs and sequential time-bin entanglement with Si3N4 microring resonators[J]. Optics Express, 27, 19309-19318(2019).

[240] Samara F, Maring N, Martin A et al. Entanglement swapping between independent and asynchronous integrated photon-pair sources[J]. Quantum Science and Technology, 6, 045024(2021).

[241] Fan Y R, Lyu C, Yuan C Z et al. Multi-wavelength quantum light sources on silicon nitride micro-ring chip[J]. Laser & Photonics Reviews, 17, 2300172(2023).

[242] Chen R Y, Luo Y H, Long J B et al. Ultralow-loss integrated photonics enables bright, narrow-band, photon-pair sources[EB/OL]. http:∥arxiv.org/abs/2404.13387v2

[243] Lu X Y, Li Q, Westly D A et al. Chip-integrated visible-telecom entangled photon pair source for quantum communication[J]. Nature Physics, 15, 373-381(2019).

[244] Li J Y, Zhang Q N, Wang J T et al. An integrated 3C-silicon carbide-on-insulator photonic platform for nonlinear and quantum light sources[J]. Communications Physics, 7, 125(2024).

[245] Guo X, Zou C L, Schuck C et al. Parametric down-conversion photon-pair source on a nanophotonic chip[J]. Light, Science & Applications, 6, e16249(2017).

[246] Steiner T J, Castro J E, Chang L et al. Ultrabright entangled-photon pair generation from an AlGaAs-on-insulator microring resonator[J]. PRX Quantum, 2, 010337(2021).

[247] Kumar R R, Raevskaia M, Pogoretskii V et al. Entangled photon pair generation from an InP membrane micro-ring resonator[J]. Applied Physics Letters, 114, 021104(2019).

[248] Zeng H, He Z Q, Fan Y R et al. Quantum light generation based on GaN microring toward fully on-chip source[J]. Physical Review Letters, 132, 133603(2024).

[249] Ma Z H, Chen J Y, Li Z et al. Ultrabright quantum photon sources on chip[J]. Physical Review Letters, 125, 263602(2020).

[250] Jahanbozorgi M, Yang Z J, Sun S M et al. Generation of squeezed quantum microcombs with silicon nitride integrated photonic circuits[J]. Optica, 10, 1100-1101(2023).

[251] Paesani S, Borghi M, Signorini S et al. Near-ideal spontaneous photon sources in silicon quantum photonics[J]. Nature Communications, 11, 2505(2020).

[252] Pelucchi E, Fagas G, Aharonovich I et al. The potential and global outlook of integrated photonics for quantum technologies[J]. Nature Reviews Physics, 4, 194-208(2022).

[253] Xiang C, Jin W, Bowers J E. Silicon nitride passive and active photonic integrated circuits: trends and prospects[J]. Photonics Research, 10, A82-A96(2022).

[254] Diddams S A, Jones D J, Ye J et al. Direct link between microwave and optical frequencies with a 300 THz femtosecond laser comb[J]. Physical Review Letters, 84, 5102-5105(2000).

[255] Pfeiffer M H P, Herkommer C, Liu J Q et al. Octave-spanning dissipative Kerr soliton frequency combs in Si3N4 microresonators[J]. Optica, 4, 684-691(2017).

[256] Yu S P, Briles T C, Moille G T et al. Tuning Kerr-soliton frequency combs to atomic resonances[J]. Physical Review Applied, 11, 044017(2019).

[257] Xue X X, Zheng X P, Zhou B K. Super-efficient temporal solitons in mutually coupled optical cavities[J]. Nature Photonics, 13, 616-622(2019).

[258] Li M, Xue X X, Zhang Y L et al. Breaking the efficiency limitations of dissipative Kerr solitons using nonlinear couplers[J]. Science China Physics, 67, 234211(2024).

[259] Helgason Ó B, Girardi M, Ye Z C et al. Surpassing the nonlinear conversion efficiency of soliton microcombs[J]. Nature Photonics, 17, 992-999(2023).

[260] Xue X X, Grelu P, Yang B F et al. Dispersion-less Kerr solitons in spectrally confined optical cavities[J]. Light: Science & Applications, 12, 19(2023).

[261] Lucas E, Yu S P, Briles T C et al. Tailoring microcombs with inverse-designed, meta-dispersion microresonators[J]. Nature Photonics, 17, 943-950(2023).

[262] Lin T, Dutt A, Ji X C et al. Long-term stabilization and operation of a soliton micro-comb for 9-days[C], STu3J.5(2019).

[263] Buzaverov K A, Baburin A S, Sergeev E V et al. Silicon nitride integrated photonics from visible to mid-infrared spectra[EB/OL]. http:∥arxiv.org/abs/2405.10038v1

Tools

Get Citation

Copy Citation Text

Huamin Zheng, Kunpeng Yu, Shichang Li, Ruiyang Chen, Jiaxuan Wang, Zhiyang Chen, Baoqi Shi, Zhongkai Wang, Yi-Han Luo, Jinbao Long, Wei Sun, Wei Liang, Chengying Bao, Hairun Guo, Junqiu Liu. Ultralow-Loss Silicon Nitride Integrated Photonics: Nonlinear Optics and Applications (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513018

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Integrated Optics

Received: Jun. 17, 2024

Accepted: Jul. 18, 2024

Published Online: Aug. 5, 2024

The Author Email: Liu Junqiu (liujq@iqasz.cn)

DOI:10.3788/AOS241178

CSTR:32393.14.AOS241178

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology