Acta Optica Sinica, Volume. 44, Issue 15, 1513018(2024)

Ultralow-Loss Silicon Nitride Integrated Photonics: Nonlinear Optics and Applications (Invited)

Huamin Zheng1, Kunpeng Yu1,2, Shichang Li1,3, Ruiyang Chen1,3, Jiaxuan Wang1,3, Zhiyang Chen1,3, Baoqi Shi1, Zhongkai Wang1, Yi-Han Luo1, Jinbao Long1, Wei Sun1, Wei Liang4, Chengying Bao5, Hairun Guo6, and Junqiu Liu1,2、*
Author Affiliations
  • 1International Quantum Academy, Shenzhen 518048, Guangdong , China
  • 2Hefei National Laboratory, Hefei 230088, Anhui , China
  • 3Institute for Quantum Science and Engineering,Southern University of Science and Technology, Shenzhen 518055, Guangdong , China
  • 4Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou 215123, Jiangsu , China
  • 5Tsinghua University, Beijing 100084, China
  • 6Shanghai University, Shanghai 200444, China
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    Figures & Tables(9)
    Characteristics of optical phenomena in silicon nitride microresonators. (a) 100 GHz FSR silicon nitride microresonator[47]; (b) mode spot of silicon nitride waveguide[47]; (c) group velocity dispersion in different wavelength ranges; (d) schematic of FWM; (e) soliton spectra[47] (inset: temporal waveform of soliton)
    Experimental setup for bright soliton generation, forward and backward tuning processes, and spectra of solitons with different numbers[85]. (a) Experimental setup; (b) forward and backward tuning processes; (c) spectra of soliton (N=1, 2, 3)
    Generation of dark pulses. (a) Transmission power of the microresonator (inset: principle diagram of intensity modulation); (b) 10 GHz dark pulses obtained by simulation and experiment (inset: temporal waveforms of dark pulses)
    Optical parametric amplification and relation between wavelength and gain[9]. (a) Optical parametric amplification schematic diagram; (b) relation between wavelength and gain
    Principle of supercontinuum generation, and spectra and dispersion in various wavelength bands[128]. (a) Schematic diagram; (b) spectra and dispersion in different wavelength bands
    Self-injection locking[105]. (a) Schematic diagram; (b) tuning curve
    FWM in the microring. (a) Microcavity resonance line and generation of photon pairs; (b) experiment scheme and condition of energy conservation
    Applications of nonlinear optics. (a) Astrospectroscopy[175]; (b) dual-comb spectroscopy[176]; (c) coherent communication[177]; (d) atomic clock[178]; (e) optical computing[2]; (f) optical ranging[179]; (g) optical imaging[180]; (h) microwave synthesis[105]; (i) quantum light source
    • Table 1. Comparison of performance of integrated microcavity quantum light sources on different material platforms

      View table

      Table 1. Comparison of performance of integrated microcavity quantum light sources on different material platforms

      ReferenceMaterial platformCMOS process compatibilityPrincipleLinewidth /GHz

      Brightness at 1 mW /

      (Hz·GHz-1

      Two-photon interference visibility /%
      Ref. [242Si3N4YesSFWM0.0261.2×10997.3
      Ref. [241Si3N4YesSFWM0.1209.6×10697.3
      Ref. [238Si3N4YesSFWM0.0606.5×10790.0
      Ref. [243Si3N4YesSFWM0.9101.1×10782.7
      Ref. [232SiliconYesSFWM2.1001.6×10895.9
      Ref. [2443C-SiCYesSPDC5.0001.9×10986.0
      Ref. [245AINYesSPDC0.7008.3×106
      Ref. [246AlGaAsNoSFWM0.1002.0×101197.1
      Ref. [247InPNoSFWM3.1008.3×106
      Ref. [248GaNNoSFWM0.3008.3×10695.5
      Ref. [249PPLNNoSPDC1.2002.3×109
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    Huamin Zheng, Kunpeng Yu, Shichang Li, Ruiyang Chen, Jiaxuan Wang, Zhiyang Chen, Baoqi Shi, Zhongkai Wang, Yi-Han Luo, Jinbao Long, Wei Sun, Wei Liang, Chengying Bao, Hairun Guo, Junqiu Liu. Ultralow-Loss Silicon Nitride Integrated Photonics: Nonlinear Optics and Applications (Invited)[J]. Acta Optica Sinica, 2024, 44(15): 1513018

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    Paper Information

    Category: Integrated Optics

    Received: Jun. 17, 2024

    Accepted: Jul. 18, 2024

    Published Online: Aug. 5, 2024

    The Author Email: Liu Junqiu (liujq@iqasz.cn)

    DOI:10.3788/AOS241178

    CSTR:32393.14.AOS241178

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