Acta Optica Sinica, Volume. 40, Issue 22, 2216001(2020)

Porous Silica Antireflective Film at Ultraviolet Laser Wavelength (266 nm)

Bin Shen*, Huai Xiong, Xu Zhang, and Haiyuan Li
Author Affiliations
  • Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    Figures & Tables(9)
    Particle size distributions of SiO2 in sol with different concentrations
    Optical properties of fourth harmonic generation SiO2 antireflective films. (a) Transmittance curves; (b) transmittance values at 266 nm
    Refractive index of fourth harmonic generation SiO2 antireflective films
    Surface roughness (root-mean-square) of fourth harmonic generation SiO2 antireflective films
    Schematic of laser damage resistance of sol-gel SiO2 film
    Scanning electron micrograph of 1# film surface
    Laser damage test of fourth harmonic generation SiO2 antireflective films. (a) Laser-induced damage threshold; (b) damage morphology of 1# film
    Properties of fourth harmonic generation SiO2 antireflective films in high humidity environment. (a) Transmittance change at 266 nm; (b) contact angle change
    • Table 1. Thickness of the film prepared in SiO2 sol with different concentrations

      View table

      Table 1. Thickness of the film prepared in SiO2 sol with different concentrations

      SiO2 solViscosity /(MPa·s)Dip coating speed /(cm·min-1)Surface tension /(mN·m-1)Density /(g·cm-3)Calculated thickness of wet coating /nmMeasured thickness of dry coating /nm
      1#1.4084.522.600.8000207954.559
      2#1.3965.522.570.7974237052.817
      3#1.375722.850.7957275054.922
      4#1.3638.522.690.7944312052.047
      5#1.3451022.850.7935344052.396
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    Bin Shen, Huai Xiong, Xu Zhang, Haiyuan Li. Porous Silica Antireflective Film at Ultraviolet Laser Wavelength (266 nm)[J]. Acta Optica Sinica, 2020, 40(22): 2216001

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    Paper Information

    Category: Materials

    Received: Jul. 6, 2020

    Accepted: Jul. 31, 2020

    Published Online: Oct. 25, 2020

    The Author Email: Shen Bin (bingo2011@siom.ac.cn)

    DOI:10.3788/AOS202040.2216001

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