Acta Optica Sinica, Volume. 43, Issue 19, 1905001(2023)

Design of Two-Dimensional Metrological Planar Grating

Wei Yuan, Yu Zhu, Ming Zhang, and Leijie Wang*
Author Affiliations
  • Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
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    References(19)

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    Wei Yuan, Yu Zhu, Ming Zhang, Leijie Wang. Design of Two-Dimensional Metrological Planar Grating[J]. Acta Optica Sinica, 2023, 43(19): 1905001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Feb. 20, 2023

    Accepted: Apr. 23, 2023

    Published Online: Oct. 23, 2023

    The Author Email: Leijie Wang (wang-lj66@mail.tsinghua.edu.cn)

    DOI:10.3788/AOS230577

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