Acta Optica Sinica, Volume. 43, Issue 19, 1905001(2023)
Design of Two-Dimensional Metrological Planar Grating
[1] Wang L J, Zhang M, Zhu Y. Review of monomeric large-size and high precision holographic planar grating manufacturing technology[J]. Optics and Precision Engineering, 29, 1759-1768(2021).
[2] Chen C G. Beam alignment and image metrology for scanning beam interference lithography: fabricating gratings with nanometer phase accuracy[D](2003).
[3] Wang L J, Guo Z W, Ye W N et al. Ultra-precision spatial-separated heterodyne Littrow grid encoder displacement measurement system[J]. Optics and Precision Engineering, 30, 499-509(2022).
[4] Wei L J, Zhang W T, Xiong X M et al. A high-precision plane grating displacement measurement[J]. Laser Journal, 41, 17-21(2020).
[5] de Jong F, van der Pasch B, Castenmiller T et al. Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system[J]. Proceedings of SPIE, 7274, 608-617(2009).
[6] Castenmiller T, van de Mast F, de Kort T et al. Towards ultimate optical lithography with NXT: 1950i dual stage immersion platform[J]. Proceedings of SPIE, 7640, 76401N(2010).
[7] Wang L J, Zhang M, Zhu Y et al. Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner[J]. Optics and Precision Engineering, 27, 1909-1918(2019).
[8] Zhu Y, Wang L J, Zhang M et al. Design of beam pose automatic alignment system for an interference lithography scanner[J]. Journal of Tsinghua University (Science and Technology), 55, 716-721, 733(2015).
[9] Wu Y F. Design and research on heterodyne planer grating encoder with nanometer resolution[D](2015).
[10] Wang X Y. Research of high-precision displacement measurement system based on the principle of diffraction and interference[D], 30-53(2014).
[11] Kang S, Xiong X M, Wang P et al. Design of reading head of 8 subdivision grating interferometer based on Littrow angle[J]. Laser Journal, 43, 38-42(2022).
[12] Zheng Z Z, Yang Z, Xiu L C. Development and application of shortwave infrared convex blazed grating with high diffraction efficiency[J]. Acta Optica Sinica, 40, 1205002(2020).
[13] Huang S S. Study on high diffraction efficiency immersion grating[D](2020).
[14] Chen X R, Tang Y, Li C M et al. Design of crossed planar phase grating for metrology[J]. Proceedings of SPIE, 10621, 106211D(2018).
[15] Zhu J Y, Ning Y, Liu L A et al. Design and fabrication of highly selective polarizers using metallic–dielectric gratings[J]. Photonics, 10, 52(2023).
[16] Xie H, Huo F R, Xue C X. Structural optimization design and analysis of a new type of coupled grating for head-mounted display[J]. Acta Optica Sinica, 42, 1405001(2022).
[17] Ge D B, Yan Y B[M]. Finite-difference time-domain method for electromagnetic waves(2011).
[18] Luo J Y, Guo Z, Huang H et al. Synchrotron radiation research on diffraction efficiency of multilayer coated grating[J]. Acta Optica Sinica, 41, 1405001(2021).
[19] Zhou T Y, Li L J, Ren J J et al. Pulsed terahertz nondestructive testing of glass fiber reinforced plastics based on FDTD[J]. Acta Optica Sinica, 40, 1226002(2020).
Get Citation
Copy Citation Text
Wei Yuan, Yu Zhu, Ming Zhang, Leijie Wang. Design of Two-Dimensional Metrological Planar Grating[J]. Acta Optica Sinica, 2023, 43(19): 1905001
Category: Diffraction and Gratings
Received: Feb. 20, 2023
Accepted: Apr. 23, 2023
Published Online: Oct. 23, 2023
The Author Email: Leijie Wang (wang-lj66@mail.tsinghua.edu.cn)