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Acta Optica Sinica, Volume. 43, Issue 19, 1905001(2023)

Design of Two-Dimensional Metrological Planar Grating

Wei Yuan, Yu Zhu, Ming Zhang, and Leijie Wang*
Author Affiliations
  • Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (19)
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    References (19)
    Cited By (3)
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    Figures & Tables(19)
    Yee cell

    Fig. 1. Yee cell

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    Unit diagram of grating of quadrangular prism bump. (a) 3D diagram of simulation model; (b) side view image of grating array

    Fig. 2. Unit diagram of grating of quadrangular prism bump. (a) 3D diagram of simulation model; (b) side view image of grating array

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    Diagram of full-order far field diffraction distribution

    Fig. 3. Diagram of full-order far field diffraction distribution

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    Diffraction intensity map of S-polarization light at different wavelengths

    Fig. 4. Diffraction intensity map of S-polarization light at different wavelengths

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    Grating processing result. (a) Cross-section view; (b) top view

    Fig. 5. Grating processing result. (a) Cross-section view; (b) top view

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    3D diagram of grating unit simulation model with ladder-shaped bump

    Fig. 6. 3D diagram of grating unit simulation model with ladder-shaped bump

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    Grating diffraction intensity varying with groove depth

    Fig. 7. Grating diffraction intensity varying with groove depth

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    Grating unit with corner-rounded ladder-shaped bump. (a) 3D diagram of simulation model; (b) side view image

    Fig. 8. Grating unit with corner-rounded ladder-shaped bump. (a) 3D diagram of simulation model; (b) side view image

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    Diffraction efficiency results of samples with different groove depths

    Fig. 9. Diffraction efficiency results of samples with different groove depths

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    Companion of simulation results and experimental results with duty cycle of 45.0%

    Fig. 10. Companion of simulation results and experimental results with duty cycle of 45.0%

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    Comparison of simulation results and experimental results with different duty cycles

    Fig. 11. Comparison of simulation results and experimental results with different duty cycles

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    Final grating processing result. (a) Cross-section view; (b) top view

    Fig. 12. Final grating processing result. (a) Cross-section view; (b) top view

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    Top view of grating wafer

    Fig. 13. Top view of grating wafer

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    Final grating diffraction efficiency test chart. (a) P-polarization light; (b) S-polarization light

    Fig. 14. Final grating diffraction efficiency test chart. (a) P-polarization light; (b) S-polarization light

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    • Table 1. Design specifications of 2D grating

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      Table 1. Design specifications of 2D grating

      Parameter of 2D gratingDesign specification
      Grating typeReflection-type
      Material of reflection filmAluminum
      Wavelength of incident light /nm780
      Grating density /（line·mm-1）1200
      Incidence angle /（°）27.9
      Diffraction efficiency of S/P-polarization light /%≥30
      Diffraction uniformity of S/P-polarization light /%≤10
      Diffraction equilibrium of S/P-polarization light /%≤10

    • Table 2. Simulation results of grating model with ladder-shaped bump

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      Table 2. Simulation results of grating model with ladder-shaped bump

      ParameterCondition 1Condition 2Condition 3Condition 4Condition 5Condition 6Condition 7
      Top dimension /nm432458440440440440440
      Bottom dimension /nm502515550525500475440
      Groove depth /nm240221200200200200200
      Diffraction efficiency（P，-1）/%16.811.96.45.95.34.74.1
      Diffraction efficiency（S，-1）/%69.473.175.475.676.076.376.6

    • Table 3. Diffraction efficiency simulation results with different mesh settings

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      Table 3. Diffraction efficiency simulation results with different mesh settings

      Mesh setting /nmDiffraction efficiency（P，-1）/%
      340.0
      839.1

    • Table 4. Parameters of grating manufacturing

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      Table 4. Parameters of grating manufacturing

      Parameter of manufacturingValue
      Grating density /（line·mm-1）1200
      Grating period /nm833.3
      Grating dimension /nm550
      Groove depth /nm260
      Duty cycle /%46.7

    • Table 5. Simulation results and measurement results of final grating

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      Table 5. Simulation results and measurement results of final grating

      ParameterSpecificationSimulation resultExperimental result
      Diffraction efficiency of P-polarization light /%≥3046.038.0
      Diffraction uniformity of P-polarization /%≤10—6.3
      Diffraction efficiency of S-polarization light /%≥3052.937.8
      Diffraction uniformity of S-polarization light /%≤10—9.3
      Diffraction equilibrium of S/P-polarization light /%≤107.00.3
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    Wei Yuan, Yu Zhu, Ming Zhang, Leijie Wang. Design of Two-Dimensional Metrological Planar Grating[J]. Acta Optica Sinica, 2023, 43(19): 1905001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Feb. 20, 2023

    Accepted: Apr. 23, 2023

    Published Online: Oct. 23, 2023

    The Author Email: Leijie Wang (wang-lj66@mail.tsinghua.edu.cn)

    DOI:10.3788/AOS230577

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology