Acta Optica Sinica, Volume. 43, Issue 19, 1905001(2023)
Design of Two-Dimensional Metrological Planar Grating
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Wei Yuan, Yu Zhu, Ming Zhang, Leijie Wang. Design of Two-Dimensional Metrological Planar Grating[J]. Acta Optica Sinica, 2023, 43(19): 1905001
Paper Information
Category: Diffraction and Gratings
Received: Feb. 20, 2023
Accepted: Apr. 23, 2023
Published Online: Oct. 23, 2023
The Author Email: Leijie Wang (wang-lj66@mail.tsinghua.edu.cn)
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