Design of Two-Dimensional Metrological Planar Grating

Acta Optica Sinica, Volume. 43, Issue 19, 1905001(2023)

Wei Yuan, Yu Zhu, Ming Zhang, and Leijie Wang^*

Author Affiliations

Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

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Wei Yuan, Yu Zhu, Ming Zhang, Leijie Wang. Design of Two-Dimensional Metrological Planar Grating[J]. Acta Optica Sinica, 2023, 43(19): 1905001

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Paper Information

Category: Diffraction and Gratings

Received: Feb. 20, 2023

Accepted: Apr. 23, 2023

Published Online: Oct. 23, 2023

The Author Email: Leijie Wang (wang-lj66@mail.tsinghua.edu.cn)

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