[1] [1] Jeongho Lee, Yousik Kim, Sungryoung Kim et al.. Real-time application of critical dimension measurement of TFT-LCD pattern using a newly proposed 2D image-processing algorithm［J］. Optics and Lasers in Engineering, 2008, 46(7): 558～569

[2] [2] Duming Tsai, Shiachih Lai. Defect detection in periodically patterned surfaces using independent component analysis［J］. Pattern Recognition, 2008, 41(9): 2812～2832

[3] [3] Liu X. Y., Wang W. H., Sun Y.. Dynamic evaluation of autofocusing for automated microscopic analysis of blood smear and pap smear［J］. Journal of Microscopy, 2007, 227(1): 15～23

[4] [4] Liang Yiyong, Yang Guoguang. Defocusing detection based on dual-quadrant detector［J］. Optical Instruments, 2004, 26(6): 7～11

[5] [5] Rhee Hyuggyo, Kim Dongik, Lee Yunwoo. Realization and performance evaluation of high speed autofocusing for direct laser lithography［J］. Rev. Sci. Instrum., 2009, 80(7): 073103

[6] [6] Rhee H. G., Kim D., Hong S. K. et al.. 300 mm reference wafer fabrication by using direct laser lithography［J］. Review of Scientific Instruments, 2008, 79(10): 578～583

[7] [7] Weiyao Hsu, Chienshing Lee, Pojui Chen et al.. Development of the fast astigmatic auto-focus microscope system［J］. Measurement Science and Technology, 2009, 20(4): 45902～45910

[8] [8] Fan Fuming, Cheng Lianglun, Wang Xiaofen et al.. A new type of high-speed automatic focusing system［J］. Opto-Electronic Engineering, 2010, 37(5): 127～132

[9] [9] Elfizy A. T., Bone G. M., Elbestawi M. A.. Design and control of a dual-stage feed drive［J］. International Journal of Machine Tools & Manufacture, 2005, 45(2): 153～165

[10] [10] Li Guo, Wang Bo, Dong Shen et al.. Design and control of dual-stage feed drive system in ultra-precision machine tools［J］. Optics and Precision Engineering, 2009, 17(6): 1426～1430

[11] [11] Wang Xihua, Guo Shuxiang, Ye Xiufen et al.. Modeling and feed-forward control based on piezoelectric ceramic hysteretic［J］. Electric Machines and Control, 2009, 13(5): 766～771

[12] [12] Chen Lu, Xu Wendong, Zhu Qing. A novel focus servo module in hybrid magneto-optical recording testing system［J］. Acta Optica Sinica, 2009, 29(5): 1341～1346

[13] [13] Hwee Choo Liawa, Bijan Shirinzadeh, Julian Smith. Enhanced sliding mode motion tracking control of piezoelectric actuators［J］. Sensors & Actuators: A. Physical., 2007, 138(1): 194～202

[14] [14] Lin Chihjer, Chen Shuyin. Evolutionary algorithm based feedforward control for contouring of a biaxial piezo-actuated stage［J］. Mechatronics, 2009, 19(6): 829～839

[15] [15] Wei Jifeng, Guan Youguang, Zhou Shan et al.. Online calibration methods for high energy laser energy measuring equipment［J］. Chinese J. Lasers, 2009, 36(9): 2399～2403

[16] [16] Kangsun Choi, Junsuk Lee, Sungjae Ko. New autofocusing technique using the frequency selective weighted median filter for video cameras［J］. IEEE Transactions on Consumer Electronics, 1999, 45(3): 820～826