Chinese Journal of Lasers, Volume. 38, Issue 2, 208005(2011)
A Fast Detection and Compensation of Microscope Defocus Method Based on Laser Triangulation Method on TFT-LCD Inspection
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Fan Fuming, Cheng Lianglun. A Fast Detection and Compensation of Microscope Defocus Method Based on Laser Triangulation Method on TFT-LCD Inspection[J]. Chinese Journal of Lasers, 2011, 38(2): 208005
Paper Information
Category: Measurement and metrology
Received: May. 14, 2010
Accepted: --
Published Online: Jan. 30, 2011
The Author Email: Fuming Fan (fanfumin84@126.com)
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